inverse lithography technology
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Advanced memory cell design optimization with inverse lithography technology

2020 ◽  
Author(s):  
Jiro Higuchi ◽  
Weiting Wang ◽  
Takamasa Takaki ◽  
Hiromitsu Mashita ◽  
Shigeki Nojima ◽  
...  
Keyword(s):  
Design Optimization ◽  
Memory Cell ◽  
Cell Design ◽  
Inverse Lithography Technology ◽  
Lithography Technology

Inverse Lithography Technology (ILT) Enabled Source Mask Optimization (SMO)

2019 ◽  
Vol 18 (1) ◽  
pp. 299-314 ◽  
Author(s):  
Linyong Pang ◽  
Guangming Xiao ◽  
Vikram Tolani ◽  
Peter Hu ◽  
Tom Cecil ◽  
...  
Keyword(s):  
Inverse Lithography Technology ◽  
Lithography Technology

Hot-Spots Aware Inverse Lithography Technology

2019 ◽  
Vol 18 (1) ◽  
pp. 367-372
Author(s):  
Yiwei Yang ◽  
Zheng Shi ◽  
Shanhu Shen ◽  
Chunlei Xie
Keyword(s):  
Hot Spots ◽  
Inverse Lithography Technology ◽  
Lithography Technology

From Computational Lithography to Computational Inspection: Inverse Lithography Technology (ILT) and Inverse Inspection Technology (IIT)

2019 ◽  
Vol 27 (1) ◽  
pp. 433-442
Author(s):  
Linyong Pang ◽  
Danping Peng ◽  
Peter Hu ◽  
Dongxue Chen ◽  
Tom Cecil ◽  
...  
Keyword(s):  
Inverse Lithography Technology ◽  
Lithography Technology

MTO-like reference mask modeling for advanced inverse lithography technology patterns

2017 ◽  
Author(s):  
Jongju Park ◽  
Jongin Moon ◽  
Suein Son ◽  
Donghoon Chung ◽  
Byung-Gook Kim ◽  
...  
Keyword(s):  
Inverse Lithography Technology ◽  
Lithography Technology
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