From Computational Lithography to Computational Inspection: Inverse Lithography Technology (ILT) and Inverse Inspection Technology (IIT)

2019 ◽  
Vol 27 (1) ◽  
pp. 433-442
Author(s):  
Linyong Pang ◽  
Danping Peng ◽  
Peter Hu ◽  
Dongxue Chen ◽  
Tom Cecil ◽  
...  
Keyword(s):  
Inverse Lithography Technology ◽  
Lithography Technology

Inverse lithography technology (ILT): keep the balance between SRAF and MRC at 45 and 32 nm

2007 ◽  
Author(s):  
Linyong Pang ◽  
Yong Liu ◽  
Thuc Dam ◽  
Kresimir Mihic ◽  
Thomas Cecil ◽  
...  
Keyword(s):  
Inverse Lithography Technology ◽  
Lithography Technology

Inverse lithography technology at low k1: placement and accuracy of assist features

2006 ◽  
Author(s):  
Andrew Moore ◽  
Timothy Lin ◽  
Yong Liu ◽  
Gordon Russell ◽  
Linyong Pang ◽  
...  
Keyword(s):  
Inverse Lithography Technology ◽  
Lithography Technology

Advanced memory cell design optimization with inverse lithography technology

2020 ◽  
Author(s):  
Jiro Higuchi ◽  
Weiting Wang ◽  
Takamasa Takaki ◽  
Hiromitsu Mashita ◽  
Shigeki Nojima ◽  
...  
Keyword(s):  
Design Optimization ◽  
Memory Cell ◽  
Cell Design ◽  
Inverse Lithography Technology ◽  
Lithography Technology

Pushing the lithography limit: applying inverse lithography technology (ILT) at the 65nm generation

2006 ◽  
Author(s):  
Chi-Yuan Hung ◽  
Bin Zhang ◽  
Eric Guo ◽  
Linyong Pang ◽  
Yong Liu ◽  
...  
Keyword(s):  
Inverse Lithography Technology ◽  
Lithography Technology

Manufacturability study of masks created by inverse lithography technology (ILT)

2005 ◽  
Author(s):  
Patrick M. Martin ◽  
C. J. Progler ◽  
G. Xiao ◽  
R. Gray ◽  
L. Pang ◽  
...  
Keyword(s):  
Inverse Lithography Technology ◽  
Lithography Technology

Improvement of KrF contact layer by inverse lithography technology with assist feature

2010 ◽  
Author(s):  
Sungho Jun ◽  
Yeon-Ah Shim ◽  
Jaeyoung Choi ◽  
Kwangsun Choi ◽  
Jae-won Han ◽  
...  
Keyword(s):  
Contact Layer ◽  
Inverse Lithography Technology ◽  
Lithography Technology
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