physical vapor deposition processes
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2015 ◽  
Vol 119 (36) ◽  
pp. 20900-20910 ◽  
Author(s):  
Boris Scherwitzl ◽  
Christian Röthel ◽  
Andrew O. F. Jones ◽  
Birgit Kunert ◽  
Ingo Salzmann ◽  
...  

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