Plasma assisted physical vapor deposition processes: A review

R. F. Bunshah; C. V. Deshpandey

doi:10.1116/1.572993

Plasma assisted physical vapor deposition processes: A review

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.572993 ◽

1985 ◽

Vol 3 (3) ◽

pp. 553-560 ◽

Cited By ~ 47

Author(s):

R. F. Bunshah ◽

C. V. Deshpandey

Keyword(s):

Vapor Deposition ◽

Physical Vapor Deposition ◽

Physical Vapor Deposition Processes ◽

Deposition Processes

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Abstract: Physical Vapor Deposition Processes for Thick Films of Metals and Compounds

Journal of Vacuum Science and Technology ◽

10.1116/1.1317972 ◽

1973 ◽

Vol 10 (1) ◽

pp. 271-271 ◽

Cited By ~ 2

Author(s):

R. F. Bunshah

Keyword(s):

Vapor Deposition ◽

Physical Vapor Deposition ◽

Thick Films ◽

Physical Vapor Deposition Processes ◽

Deposition Processes

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Evaporation rate and composition monitoring of electron beam physical vapor deposition processes

Surface and Coatings Technology ◽

10.1016/0257-8972(96)80006-5 ◽

1995 ◽

Vol 76-77 ◽

pp. 681-686 ◽

Cited By ~ 3

Author(s):

T.M. Anklam ◽

L.V. Berzins ◽

D.G. Braun ◽

C. Haynam ◽

T. Meier ◽

...

Keyword(s):

Electron Beam ◽

Vapor Deposition ◽

Physical Vapor Deposition ◽

Evaporation Rate ◽

Physical Vapor Deposition Processes ◽

Deposition Processes ◽

Composition Monitoring

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Improved method of nonintrusive deposition rate monitoring by atomic absorption spectroscopy for physical vapor deposition processes

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.579771 ◽

1995 ◽

Vol 13 (3) ◽

pp. 1797-1801 ◽

Cited By ~ 39

Author(s):

C. Lu ◽

Y. Guan

Keyword(s):

Atomic Absorption ◽

Deposition Rate ◽

Absorption Spectroscopy ◽

Vapor Deposition ◽

Atomic Absorption Spectroscopy ◽

Physical Vapor Deposition ◽

Improved Method ◽

Physical Vapor Deposition Processes ◽

Deposition Processes

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Evaporation rate and composition monitoring of electron beam physical vapor deposition processes

Surface and Coatings Technology ◽

10.1016/02578-9729(68)00065- ◽

1995 ◽

Vol 76-77 ◽

pp. 681-686 ◽

Cited By ~ 2

Author(s):

T Anklam

Keyword(s):

Electron Beam ◽

Vapor Deposition ◽

Physical Vapor Deposition ◽

Evaporation Rate ◽

Physical Vapor Deposition Processes ◽

Deposition Processes ◽

Composition Monitoring

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Depth of origin of sputtered atoms for elemental Al and Mg targets in physical vapor deposition processes

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.1365138 ◽

2001 ◽

Vol 19 (3) ◽

pp. 812-819

Author(s):

J. M. Bordes ◽

Ph. Bauer

Keyword(s):

Vapor Deposition ◽

Physical Vapor Deposition ◽

Physical Vapor Deposition Processes ◽

Deposition Processes

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Fabrication of Framed Beryllium Windows by High Rate Physical Vapor Deposition Processes

Journal of Vacuum Science and Technology ◽

10.1116/1.1318047 ◽

1973 ◽

Vol 10 (1) ◽

pp. 83-84 ◽

Cited By ~ 1

Author(s):

R. F. Bunshah ◽

Robert S. Juntz

Keyword(s):

Vapor Deposition ◽

Physical Vapor Deposition ◽

High Rate ◽

Physical Vapor Deposition Processes ◽

Deposition Processes

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Idiosyncrasies of Physical Vapor Deposition Processes from Various Knudsen Cells for Quinacridone Thin Film Growth on Silicon Dioxide

The Journal of Physical Chemistry C ◽

10.1021/acs.jpcc.5b04089 ◽

2015 ◽

Vol 119 (36) ◽

pp. 20900-20910 ◽

Cited By ~ 5

Author(s):

Boris Scherwitzl ◽

Christian Röthel ◽

Andrew O. F. Jones ◽

Birgit Kunert ◽

Ingo Salzmann ◽

...

Keyword(s):

Thin Film ◽

Silicon Dioxide ◽

Vapor Deposition ◽

Physical Vapor Deposition ◽

Film Growth ◽

Thin Film Growth ◽

Physical Vapor Deposition Processes ◽

Deposition Processes

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Applications of wear-resistant thick films formed by physical vapor deposition processes

Thin Solid Films ◽

10.1016/0040-6090(77)90115-8 ◽

1977 ◽

Vol 40 ◽

pp. 155-167 ◽

Cited By ~ 87

Author(s):

Kazuo Nakamura ◽

Konosuke Inagawa ◽

Kazuyuki Tsuruoka ◽

Souji Komiya

Keyword(s):

Vapor Deposition ◽

Physical Vapor Deposition ◽

Thick Films ◽

Wear Resistant ◽

Physical Vapor Deposition Processes ◽

Deposition Processes

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The Influence of Ion Bombardment on the Microstructure of Thick Deposits Produced by High Rate Physical Vapor Deposition Processes

Journal of Vacuum Science and Technology ◽

10.1116/1.1317049 ◽

1972 ◽

Vol 9 (6) ◽

pp. 1404-1405 ◽

Cited By ~ 37

Author(s):

R. F. Bunshah ◽

R. S. Juntz

Keyword(s):

Vapor Deposition ◽

Physical Vapor Deposition ◽

Ion Bombardment ◽

High Rate ◽

Physical Vapor Deposition Processes ◽

Deposition Processes

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Plasma- and Ion-Beam Assisted Physical Vapor Deposition: Processes and Materials

Structure-Property Relationships in Surface-Modified Ceramics ◽

10.1007/978-94-009-0983-0_27 ◽

1989 ◽

pp. 399-416 ◽

Cited By ~ 1

Author(s):

J. M. Rigsbee

Keyword(s):

Vapor Deposition ◽

Physical Vapor Deposition ◽

Ion Beam ◽

Physical Vapor Deposition Processes ◽

Deposition Processes

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