neutral atom lithography
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Computing light masks in neutral atom lithography

2006 ◽  
Vol 220 (1) ◽  
pp. 422-440
Author(s):  
Carsten Burstedde ◽  
Jürgen Braun ◽  
Angela Kunoth
Keyword(s):  
Neutral Atom ◽  
Neutral Atom Lithography ◽  
Atom Lithography

Sub-100 nm structures by neutral atom lithography

1999 ◽  
Vol 46 (1-4) ◽  
pp. 105-108 ◽  
Author(s):  
Th. Schulze ◽  
B. Brezger ◽  
P.O. Schmidt ◽  
R. Mertens ◽  
A.S. Bell ◽  
...  
Keyword(s):  
Neutral Atom ◽  
Neutral Atom Lithography ◽  
Atom Lithography

Resist-based neutral atom lithography

1998 ◽  
Author(s):  
J. H. Thywissen ◽  
K. S. Johnson ◽  
R. Younkin ◽  
N. H. Dekker ◽  
K. K. Berggren ◽  
...  
Keyword(s):  
Neutral Atom ◽  
Neutral Atom Lithography ◽  
Atom Lithography

Using light as a lens for submicron, neutral-atom lithography

1992 ◽  
Vol 69 (11) ◽  
pp. 1636-1639 ◽  
Author(s):  
G. Timp ◽  
R. E. Behringer ◽  
D. M. Tennant ◽  
J. E. Cunningham ◽  
M. Prentiss ◽  
...  
Keyword(s):  
Neutral Atom ◽  
Neutral Atom Lithography ◽  
Atom Lithography
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