The Micro-Structure and Electron Conduction Mechanism of Hydrogenated Nano-Crystalline Silicon Films

ABSTRACTThe hydrogenated nano-crystalline silicon (nc-Si:H) films have been deposited with PECVD method.1–2 The micro-structure of these films has been studied by TEM and HREM. The PECVD nc-Si:H films show fiber texture structure which is exceptional compared with the nano-size materials made by the method of compressing granules method. The fractal dimention of this texture structure has been calculated with a Fourier filtered image. The relationshisps between conductivity and temperature and micro-structure has also been studied and the mechanism of electron conduction is discussed.