Microscopic Understanding of the Carrier Transport Process in Ge Nanocrystals Films

Hydrogenated amorphous germanium (a-Ge:H) films were prepared by a plasma enhanced chemical vapor deposition (PECVD) technique. Ge nanocrystals (Ge NCs) films were obtained by thermal annealing of the as-deposited samples at various temperatures. P-type behavior in Ge NCs films without any external doping was attributed to the holes accumulation caused by acceptor-like surface states. It can be found that the dark conductivity and Hall mobility reached as high as 25.6 S/cm and 182 cm2/V·s in the Ge NCs film annealed at 500°C, which were increased by over four and three orders of magnitude higher than that of the as-deposited film (1.3 × 10-3 S/cm and 0.14 cm2/V·s, resp.). Carrier transport mechanisms of Ge NCs films association with the microstructural characteristics were investigated. Three kinds of temperature-dependent conductivity behaviors, which exhibit the linear relationships of ln⁡σ versus T-1/4, T-1/2, and T-1, respectively, were observed in the temperature regions from 10 K to 500 K, showing different microscopic mechanisms governing carrier transport in Ge NCs film.

Uncooled microbolometers with hydrogenated amorphous germanium-silicon films: Different device configurations and improvements on the thermosensing films

ABSTRACTWe report our main results on the development of un-cooled microbolometers based on hydrogenated amorphous Germanium-Silicon (a-GexSiy:H) thermo-sensing films deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD). Our research has been conducted to improve both, the structure of the devices (pixels) and the performance characteristics of the amorphous Germanium-Silicon thermosensing films.Our motivation is to produce microbolometers with much better performance characteristics (larger thermal coefficient of resistance, larger conductivity and better stability) than those available in commercial microbolometer arrays, based on boron doped hydrogenated amorphous silicon (a-Si:H,B).As part of our latest research, we also report the study of what we believe is the next generation of thermosensing films based on Silicon and Geranium amorphous films with embedded nanocrystals in the amorphous matrix (polymorphous films). Those materials have several advantages over amorphous, as a lower defect density, better stability and better transport properties.