capillary optic
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2018 ◽  
Vol 26 (2) ◽  
pp. 263-272 ◽  
Author(s):  
Soonmu Kwon ◽  
Jae Hong Lim ◽  
Yoshiharu Namba ◽  
Kwon Su Chon

1998 ◽  
Vol 4 (S2) ◽  
pp. 380-381
Author(s):  
C. G. Worley ◽  
L. P. Colletti ◽  
G. J. Havrilla

Recent MXRF reports have demonstrated marked x-ray flux enhancements over traditional aperturecollimating systems when using a total reflection capillary optic. In the present work, several standard reference materials (SRMs) were examined with a Kevex Omicron MXRF system to compare the elemental sensitivities achieved with an aperture x-ray guide to those obtained with a monolithic polycapillary optic (X-ray Optical Systems). This study is relevant to the MXRF community using commercial aperture-based instruments where trace elemental concentrations in a sample sometimes mandate the need for a higher primary x-ray dose, but the flexibility of incorporating various sized apertures for other samples is still maintained.By scanning the x-ray beam over a nickel/gold knife edge, the capillary focal spot diameter at the time of this work was determined to be ∼400 μm, while a 300 μm aperture provided a beam size of ∼550 μm due to beam divergence past the aperture.


1996 ◽  
Author(s):  
Lei Wang ◽  
Bimal K. Rath ◽  
Walter M. Gibson ◽  
John C. Kimball ◽  
Carolyn A. MacDonald
Keyword(s):  
X Rays ◽  

1993 ◽  
Vol 306 ◽  
Author(s):  
C. M. Dozier ◽  
M. I. Bell ◽  
D. A. Newman ◽  
R. K. Freitag ◽  
D. B. Brown ◽  
...  

AbstractCapillary optics appear to permit the fabrication of practical collimator systems for laserdriven x-ray point sources. With such collimators, the illumination of wafers can meet the tight requirements for lithographic patterning of sub-micron device structures. However, the use of x-radiation with photon energies between 800–1200 eV makes capillaries of conventional silica-based glass capillaries marginal due to their low reflectivity. The reflectivity of various materials were examined with the goal of finding alternate glasses, elements for doping glasses or surface coatings that may enhance these collimators for lithographic applications. Coating capillary surfaces with more reflective materials may be the most viable method for improving the radiation transport properties for capillary optics to be used in x-ray lithography.


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