Characterization Of Capillary-Optic Materials For Use In X-Ray Lithography

1993 ◽  
Vol 306 ◽  
Author(s):  
C. M. Dozier ◽  
M. I. Bell ◽  
D. A. Newman ◽  
R. K. Freitag ◽  
D. B. Brown ◽  
...  
Keyword(s):  
Radiation Transport ◽  
Point Sources ◽  
Capillary Surfaces ◽  
X Ray ◽  
Lithographic Patterning ◽  
Device Structures ◽  
Capillary Optics ◽  
Capillary Optic ◽  
Viable Method

AbstractCapillary optics appear to permit the fabrication of practical collimator systems for laserdriven x-ray point sources. With such collimators, the illumination of wafers can meet the tight requirements for lithographic patterning of sub-micron device structures. However, the use of x-radiation with photon energies between 800–1200 eV makes capillaries of conventional silica-based glass capillaries marginal due to their low reflectivity. The reflectivity of various materials were examined with the goal of finding alternate glasses, elements for doping glasses or surface coatings that may enhance these collimators for lithographic applications. Coating capillary surfaces with more reflective materials may be the most viable method for improving the radiation transport properties for capillary optics to be used in x-ray lithography.

The Characterization of Defects in Silicon Carbide Crystals by X-Ray Topography in the Back-Reflection Geometry

2004 ◽  
Vol 230-232 ◽  
pp. 1-16 ◽  
Author(s):  
William M. Vetter
Keyword(s):  
Silicon Carbide ◽  
Computer Algorithms ◽  
Reflection Mode ◽  
X Ray ◽  
Back Reflection ◽  
Device Structures ◽  
Reflection Geometry ◽  
Grade Silicon ◽  
Favorable Conditions

Synchrotron white-beam x-ray topographs taken in the back-reflection mode have proved a powerful tool in the study of defects in semiconductor-grade silicon carbide crystals. Capable of mapping the distribution of axial dislocations across a wafer's area (notably the devastating micropipe defect), it can also provide information on their natures. Under favorable conditions, various other types of defect may be observed in back-reflection topographs of SiC, among which are subgrain boundaries, inclusions, and basal plane dislocations. Observed defect images in backreflection topographs may be simulated using relatively simple computer algorithms based on ray tracing. It has been possible to use back-reflection topographs of SiC substrates with device structures deposited upon them to relate the incidence of defects to device failure.

Solution Growth and Characterization of Icosahedral Boron Arsenide (B12As2)

2011 ◽  
Vol 1307 ◽  
Author(s):  
C.E. Whiteley ◽  
Y. Zhang ◽  
A. Mayo ◽  
J.H. Edgar ◽  
Y. Gong ◽  
...  
Keyword(s):  
Room Temperature ◽  
Solution Growth ◽  
High Quality ◽  
Burgers Vector ◽  
X Ray ◽  
Dislocation Densities ◽  
Boron Arsenide ◽  
Viable Method ◽  
Molten Nickel

ABSTRACTThe crystallographic properties of bulk icosahedral boron arsenide (B12As2) crystals grown by precipitation from molten nickel solutions were characterized. Large crystals (5-8 mm) were produced by dissolving the boron in nickel at 1150°C for 48-72 hours, reacting with arsenic vapor, and slowly cooling to room temperature. The crystals varied in color from black and opaque to clear and transparent. Raman spectroscopy, x-ray topography (XRT), and defect selective etching revealed that the B12As2 single crystals were high quality with low dislocation densities. Furthermore, XRT results suggest that the major face of the plate-like crystals was (111) type, while (100), (010) and (001) type facets were also observed optically. The predominant defect in these crystals was edge character growth dislocations with a <001> Burgers vector, and <-110> line direction. In short, XRT characterization shows that solution growth is a viable method for producing good quality B12As2 crystals.

scholarly journals Synchrotron x-ray microbeam diffraction from abalone shell

2004 ◽  
Vol 19 (5) ◽  
pp. 1471-1476 ◽  
Author(s):  
E. DiMasi ◽  
M. Sarikaya
Keyword(s):  
Self Assembly ◽  
Orientational Order ◽  
Amorphous Structure ◽  
Advanced Materials ◽  
Resolution Limit ◽  
X Ray Diffraction ◽  
X Ray ◽  
Capillary Optics ◽  
Abalone Shell

Microstructured biomaterials such as mollusk shells receive much attention at present, due to the promise that advanced materials can be designed and synthesized with biomimetic techniques that take advantage of self-assembly and aqueous, ambient processing conditions. A satisfactory understanding of this process requires characterization of the microstructure not only in the mature biomaterial, but at the growth fronts where the control over crystal morphology and orientation is enacted. In this paper, we present synchrotron microbeam x-ray diffraction (XRD) and electron microscopy observations near the nacre–prismatic interface of red abalone shell. The relative orientations of calcite and aragonite grains exhibit some differences from the idealizations reported previously. Long calcite grains impinge the nacre–prismatic boundary at 45° angles, suggestive of nucleation on (104) planes followed by growth along the c axis. In the region within 100 μm of the boundary, calcite and aragonite crystals lose their bulk orientational order, but we found no evidence for qualitative changes in long-range order such as ideal powder texture or an amorphous structure factor. XRD rocking curves determined the mosaic of calcite crystals in the prismatic region to be no broader than the 0.3° resolution limit of the beamline’s capillary optics, comparable to what can be measured on geological calcite single crystals.

Characterization of (Al,Ga)As/GaAs Multilayer Structures by X-Ray Interference

1990 ◽  
Vol 208 ◽  
Author(s):  
M. S. Goorsky ◽  
T. F. Kuech
Keyword(s):  
Gaas Layer ◽  
Multilayer Structures ◽  
Interference Effects ◽  
X Ray Diffraction ◽  
X Ray ◽  
Al Content ◽  
Device Structures ◽  
Experimental Resolution ◽  
Specific Device

ABSTRACTAn experimental study of x-ray interference effects from GaAs/AlxGa1−xAs multilayer structures was conducted. The presence of a GaAs layer, whose thickness ranged from 50 Å to 10 μm, between two Al0.30Ga0.70As layers was found to significantly affect the x-ray rocking curves from these structures. We determined both the thickness and the composition of the AlxGa1−xAs layers and the thickness of the GaAs layers by comparing the rocking curves to simulated ones using a dynamical x-ray diffraction model. A sensitivity analysis showed that the thickness predicted for the GaAs buried layer was precise to within 90 Å for a ≃ 2000 Å GaAs layer and that the barrier layer Al content and thickness could be determined to within 1% and 80 Å, respectively for ≃ 5000Å layers. This analysis also showed that, within experimental resolution limits, the structure determined from comparing simulated and experimental rocking curves was unique. Both the limits of this technique in determining interfacial grading and applications to specific device structures and other materials systems are discussed.

The Use of Advanced Analytical Techniques for Characterization of the Chemical, Physical, and Crystallographic Nature of a Surface

1973 ◽  
Vol 31 ◽  
pp. 132-133 ◽  
Author(s):  
R. E. Herfert
Keyword(s):  
Surface Characterization ◽  
Analytical Techniques ◽  
X Ray Diffraction ◽  
Depth Of Penetration ◽  
X Ray ◽  
The Past ◽  
Transmission Electron ◽  
Scanning Electron

Studies of the nature of a surface, either metallic or nonmetallic, in the past, have been limited to the instrumentation available for these measurements. In the past, optical microscopy, replica transmission electron microscopy, electron or X-ray diffraction and optical or X-ray spectroscopy have provided the means of surface characterization. Actually, some of these techniques are not purely surface; the depth of penetration may be a few thousands of an inch. Within the last five years, instrumentation has been made available which now makes it practical for use to study the outer few 100A of layers and characterize it completely from a chemical, physical, and crystallographic standpoint. The scanning electron microscope (SEM) provides a means of viewing the surface of a material in situ to magnifications as high as 250,000X.

High Resolution Replication of Organoclay Surfaces

1982 ◽  
Vol 40 ◽  
pp. 576-577
Author(s):  
W. W. Barker ◽  
W. E. Rigsby ◽  
V. J. Hurst ◽  
W. J. Humphreys
Keyword(s):  
Clay Mineral ◽  
Organic Molecule ◽  
Organic Molecules ◽  
X Ray Diffraction ◽  
Xrd Pattern ◽  
X Ray ◽  
Naturally Occurring ◽  
Silicate Layers ◽  
Mineral Identification

Experimental clay mineral-organic molecule complexes long have been known and some of them have been extensively studied by X-ray diffraction methods. The organic molecules are adsorbed onto the surfaces of the clay minerals, or intercalated between the silicate layers. Natural organo-clays also are widely recognized but generally have not been well characterized. Widely used techniques for clay mineral identification involve treatment of the sample with H2 O2 or other oxidant to destroy any associated organics. This generally simplifies and intensifies the XRD pattern of the clay residue, but helps little with the characterization of the original organoclay. Adequate techniques for the direct observation of synthetic and naturally occurring organoclays are yet to be developed.

Digital x-ray mapping of nanometer-size supported bimetallic catalysts

1988 ◽  
Vol 46 ◽  
pp. 530-531
Author(s):  
L. T. Germinario
Keyword(s):  
Background Radiation ◽  
Metal Cluster ◽  
Single Element ◽  
Beam Diameter ◽  
X Rays ◽  
X Ray ◽  
Major Interest ◽  
Induced Changes

Understanding the role of metal cluster composition in determining catalytic selectivity and activity is of major interest in heterogeneous catalysis. The electron microscope is well established as a powerful tool for ultrastructural and compositional characterization of support and catalyst. Because the spatial resolution of x-ray microanalysis is defined by the smallest beam diameter into which the required number of electrons can be focused, the dedicated STEM with FEG is the instrument of choice. The main sources of errors in energy dispersive x-ray analysis (EDS) are: (1) beam-induced changes in specimen composition, (2) specimen drift, (3) instrumental factors which produce background radiation, and (4) basic statistical limitations which result in the detection of a finite number of x-ray photons. Digital beam techniques have been described for supported single-element metal clusters with spatial resolutions of about 10 nm. However, the detection of spurious characteristic x-rays away from catalyst particles produced images requiring several image processing steps.

Plant Pathology Diagnosed by X-Ray Microanalysis

1987 ◽  
Vol 45 ◽  
pp. 974-975
Author(s):  
J. H. Resau ◽  
N. Howell ◽  
S. H. Chang
Keyword(s):  
Electron Microscopy ◽  
Plant Pathology ◽  
Biochemical Characterization ◽  
Nutrient Deficiency ◽  
Green Leaf ◽  
Parasitic Infestation ◽  
X Ray

Spinach grown in Texas developed “yellow spotting” on the peripheral portions of the leaves. The exact cause of the discoloration could not be determined as there was no evidence of viral or parasitic infestation of the plants and biochemical characterization of the plants did not indicate any significant differences between the yellow and green leaf portions of the spinach. The present study was undertaken using electron microscopy (EM) to determine if a micro-nutrient deficiency was the cause for the discoloration.Green leaf spinach was collected from the field and sent by express mail to the EM laboratory. The yellow and equivalent green portions of the leaves were isolated and dried in a Denton evaporator at 10-5 Torr for 24 hrs. The leaf specimens were then examined using a JEOL 100 CX analytical microscope. TEM specimens were prepared according to the methods of Trump et al.

EXELFS Studies of Carbon Fibers

1990 ◽  
Vol 48 (2) ◽  
pp. 72-73
Author(s):  
V. Serin ◽  
K. Hssein ◽  
G. Zanchi ◽  
J. Sévely
Keyword(s):  
Carbon Fibers ◽  
Energy Analysis ◽  
Electron Excitation ◽  
Complex Structures ◽  
High Modulus ◽  
Promising Technique ◽  
X Ray ◽  
Fine Structures ◽  
X Ray Absorption

The present developments of electron energy analysis in the microscopes by E.E.L.S. allow an accurate recording of the spectra and of their different complex structures associated with the inner shell electron excitation by the incident electrons (1). Among these structures, the Extended Energy Loss Fine Structures (EXELFS) are of particular interest. They are equivalent to the well known EXAFS oscillations in X-ray absorption spectroscopy. Due to the EELS characteristic, the Fourier analysis of EXELFS oscillations appears as a promising technique for the characterization of composite materials, the major constituents of which are low Z elements. Using EXELFS, we have developed a microstructural study of carbon fibers. This analysis concerns the carbon K edge, which appears in the spectra at 285 eV. The purpose of the paper is to compare the local short range order, determined by this way in the case of Courtauld HTS and P100 ex-polyacrylonitrile carbon fibers, which are high tensile strength (HTS) and high modulus (HM) fibers respectively.

Characterization of defects in tabular silver halide grains

1990 ◽  
Vol 48 (4) ◽  
pp. 1046-1047
Author(s):  
C. Goessens ◽  
D. Schryvers ◽  
J. Van Landuyt ◽  
A. Verbeeck ◽  
R. De Keyzer
Keyword(s):  
Radiation Damage ◽  
Silver Halide ◽  
Chemical Characteristics ◽  
X Ray ◽  
Free Region ◽  
Central Defect ◽  
Crystallographic Defects ◽  
Physical And Chemical ◽  
Two Sides

Silver halide grains (AgX, X=Cl,Br,I) are commonly recognized as important entities in photographic applications. Depending on the preparation specifications one can grow cubic, octahedral, tabular a.o. morphologies, each with its own physical and chemical characteristics. In the present study crystallographic defects introduced by the mixing of 5-20% iodide in a growing AgBr tabular grain are investigated. X-ray diffractometry reveals the existence of a homogeneous Ag(Br1-xIx) region, expected to be formed around the AgBr kernel. In fig. 1 a two-beam BF image, taken at T≈100 K to diminish radiation damage, of a triangular tabular grain is presented, clearly showing defect contrast fringes along four of the six directions; the remaining two sides show similar contrast under relevant diffraction conditions. The width of the central defect free region corresponds with the pure AgBr kernel grown before the mixing with I. The thickness of a given grain lies between 0.15 and 0.3 μm: as indicated in fig. 2 triangular (resp. hexagonal) grains exhibit an uneven (resp. even) number of twin interfaces (i.e., between + and - twin variants) parallel with the (111) surfaces. The thickness of the grains and the existence of the twin variants was confirmed from CTEM images of perpendicular cuts.

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