microelectronic materials
Recently Published Documents

TOTAL DOCUMENTS

101

(FIVE YEARS 1)

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(FIVE YEARS 0)

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Thermal Atomic Layer Etching of Microelectronic Materials

2021 5th IEEE Electron Devices Technology & Manufacturing Conference (EDTM) ◽

10.1109/edtm50988.2021.9421056 ◽

2021 ◽

Author(s):

Steven M. George

Keyword(s):

Atomic Layer ◽

Microelectronic Materials ◽

Atomic Layer Etching

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2018 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD)

10.1109/commad45896.2018 ◽

2018 ◽

Keyword(s):

Microelectronic Materials

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Calculation of field in plane-layered microelectronic materials

Technical Physics ◽

10.1134/s1063784217110172 ◽

2017 ◽

Vol 62 (11) ◽

pp. 1617-1626

Author(s):

I. A. Konnikov

Keyword(s):

Microelectronic Materials

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Microelectronic Materials

10.1201/9780203747230 ◽

2017 ◽

Cited By ~ 1

Author(s):

C. R. M. Grovenor

Keyword(s):

Microelectronic Materials

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Failure Analysis and the Investigation of the Structure and Composition of Microelectronic Materials

Microelectronic Materials ◽

10.1201/9780203747230-11 ◽

2017 ◽

pp. 480-529

Keyword(s):

Failure Analysis ◽

Microelectronic Materials

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Failure Analysis and the Investigation of the Structure and Composition of Microelectronic Materials

Microelectronic Materials ◽

10.1201/9780203747230-10 ◽

2017 ◽

pp. 480-529

Author(s):

C. R. M. Grovenor

Keyword(s):

Failure Analysis ◽

Microelectronic Materials

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Special aspects of the research technique of the self-organization processes in the nano- and microelectronic materials

2017 6th Mediterranean Conference on Embedded Computing (MECO) ◽

10.1109/meco.2017.7977158 ◽

2017 ◽

Author(s):

N. V. Rybina ◽

S. P. Vikhrov ◽

A. V. Alpatov ◽

N. B. Rybin ◽

N. M. Tolkach

Keyword(s):

The Self ◽

Self Organization ◽

Research Technique ◽

Microelectronic Materials

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Laser-plasma sources of ionizing radiation for simulation of radiation effects in microelectronic materials and components

Inorganic Materials Applied Research ◽

10.1134/s2075113317030248 ◽

2017 ◽

Vol 8 (3) ◽

pp. 359-363 ◽

Cited By ~ 2

Author(s):

I. N. Tsymbalov ◽

K. A. Ivanov ◽

R. V. Volkov ◽

A. B. Savel’ev ◽

L. S. Novikov ◽

...

Keyword(s):

Ionizing Radiation ◽

Laser Plasma ◽

Radiation Effects ◽

Plasma Sources ◽

Microelectronic Materials

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Energetic Cs+ion interaction with common microelectronic materials—An investigation of a future FIB candidate source

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.4963896 ◽

2016 ◽

Vol 34 (6) ◽

pp. 061203 ◽

Cited By ~ 1

Author(s):

Yariv Drezner ◽

Yuval Greenzweig ◽

Amir Raveh

Keyword(s):

Microelectronic Materials

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$1/f$ Noise and Defects in Microelectronic Materials and Devices

IEEE Transactions on Nuclear Science ◽

10.1109/tns.2015.2405852 ◽

2015 ◽

Vol 62 (4) ◽

pp. 1462-1486 ◽

Cited By ~ 73

Author(s):

D. M. Fleetwood

Keyword(s):

Microelectronic Materials

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microelectronic materialsRecently Published Documents

TOTAL DOCUMENTS

H-INDEX

Thermal Atomic Layer Etching of Microelectronic Materials

2018 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD)

Calculation of field in plane-layered microelectronic materials

Microelectronic Materials

Failure Analysis and the Investigation of the Structure and Composition of Microelectronic Materials

Failure Analysis and the Investigation of the Structure and Composition of Microelectronic Materials

Special aspects of the research technique of the self-organization processes in the nano- and microelectronic materials

Laser-plasma sources of ionizing radiation for simulation of radiation effects in microelectronic materials and components

Energetic Cs+ion interaction with common microelectronic materials—An investigation of a future FIB candidate source

$1/f$ Noise and Defects in Microelectronic Materials and Devices

microelectronic materials
Recently Published Documents