Energetic Cs+ion interaction with common microelectronic materials—An investigation of a future FIB candidate source

2016 ◽  
Vol 34 (6) ◽  
pp. 061203 ◽  
Author(s):  
Yariv Drezner ◽  
Yuval Greenzweig ◽  
Amir Raveh
Keyword(s):  
Microelectronic Materials

Maskless Laser Patterning for Gold Plating of Microelectronic Materials

1983 ◽  
Vol 130 (9) ◽  
pp. 1840-1844 ◽  
Author(s):  
R. J. von Gutfeld ◽  
M. H. Gelchinski ◽  
L. T. Romankiw
Keyword(s):  
Gold Plating ◽  
Laser Patterning ◽  
Microelectronic Materials

Etching and Surface Smoothing with Gas-Cluster Ion Beams

1999 ◽  
Vol 585 ◽  
Author(s):  
D. B. Fenner ◽  
R. P. Torti ◽  
L. P. Allen ◽  
N. Toyoda ◽  
A. R. Kirkpatrick ◽  
...  
Keyword(s):  
Surface Science ◽  
Ion Beam ◽  
Surface Processing ◽  
Figures Of Merit ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Gas Clusters ◽  
Gas Cluster Ion Beam ◽  
Microelectronic Materials ◽  
Very High

AbstractSurface processing of microelectronic materials by bombardment with nanoparticles of condensed gases (i.e., clusters) in the form of an ion beam, makes possible etching and smoothing of those surfaces to very high figures of merit. As this is not possible with any conventional ion method, gas-cluster ion-beam systems have great potential in manufacturing. The formation of gas clusters and their collision with surfaces provides an interesting arena for novel physics and surface science. This paper outlines a physical model for the clusters and surface interactions, and provides examples of surface processing. In particular, the reduction of surface roughness while etching by cluster-ion bombardment is illustrated for various materials utilized in microelectronics.

Atomically-based Field Formulations for Coupled Problems of Composition and Mechanics

2000 ◽  
Vol 653 ◽  
Author(s):  
Krishna Garikipati ◽  
Lori C. Bassman
Keyword(s):  
Atomic Level ◽  
Numerical Results ◽  
Coupled Problems ◽  
Balance Laws ◽  
Transport Mechanisms ◽  
Coupled Field ◽  
Microelectronic Materials ◽  
Thermodynamic Basis ◽  
Continuum Field

AbstractPreliminary ideas are presented on developing coupled, continuum field formulations for composition and mechanics with applications to microelectronic materials. A thermodynamic basis is constructed, reflecting atomic-level transport mechanisms and the associated mechanics. Formal arguments lead to constitutive field relations, and specification of balance laws completes the coupled field description. Early numerical results are also presented.

Application of Complex Macromolecular Architectures for Advanced Microelectronic Materials

2002 ◽  
Vol 8 (15) ◽  
pp. 3308 ◽  
Author(s):  
James L. Hedrick ◽  
Teddie Magbitang ◽  
Eric F. Connor ◽  
Thierry Glauser ◽  
Willi Volksen ◽  
...  
Keyword(s):  
Microelectronic Materials
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