Comprehensive kinetic theory of an electron emitting electrode in a low-density isotropic plasma

2019 ◽  
Vol 26 (2) ◽  
pp. 023503
Author(s):  
Alif Din
Keyword(s):  
Kinetic Theory ◽  
Low Density ◽  
Isotropic Plasma

KINETIC THEORY AND HYDRODYNAMICS FOR A LOW DENSITY GRANULAR GAS

2001 ◽  
Vol 04 (04) ◽  
pp. 397-406 ◽  
Author(s):  
JAMES W. DUFTY
Keyword(s):  
Kinetic Theory ◽  
Hard Spheres ◽  
A Priori ◽  
Inelastic Collisions ◽  
Low Density ◽  
Qualitative And Quantitative ◽  
Granular Gas ◽  
Rapid Flow ◽  
Special Case ◽  
Domain Of Validity

Many features of real granular fluids under rapid flow are exhibited as well by a system of smooth hard spheres with inelastic collisions. For such a system, it is tempting to apply standard methods of kinetic theory and hydrodynamics to calculate properties of interest. The domain of validity for such methods is a priori uncertain due to the inelasticity, but recent systematic studies continue to support the utility of kinetic theory and hydrodynamics as both qualitative and quantitative descriptions for many physical states. The basis for kinetic theory and hydrodynamic descriptions is discussed briefly for the special case of a low density gas.

Application of Improved Voltage Compensation in the SEM to Imaging of Organic Materials

1973 ◽  
Vol 31 ◽  
pp. 444-445
Author(s):  
P.J. Killingworth ◽  
M. Warren
Keyword(s):  
Electron Beam ◽  
Organic Materials ◽  
Operating Parameters ◽  
Low Density ◽  
Beam Diameter ◽  
Incident Electron Beam ◽  
Specimen Material ◽  
Voltage Compensation ◽  
Selection Of ◽  
Scanning Electron

Ultimate resolution in the scanning electron microscope is determined not only by the diameter of the incident electron beam, but by interaction of that beam with the specimen material. Generally, while minimum beam diameter diminishes with increasing voltage, due to the reduced effect of aberration component and magnetic interference, the excited volume within the sample increases with electron energy. Thus, for any given material and imaging signal, there is an optimum volt age to achieve best resolution.In the case of organic materials, which are in general of low density and electric ally non-conducting; and may in addition be susceptible to radiation and heat damage, the selection of correct operating parameters is extremely critical and is achiev ed by interative adjustment.

Quantitative defect studies in semiconductor TEM samples prepared by low angle ion milling

1995 ◽  
Vol 53 ◽  
pp. 512-513
Author(s):  
L. Mulestagno ◽  
J.C. Holzer ◽  
P. Fraundorf
Keyword(s):  
Sample Preparation ◽  
Milling Time ◽  
High Density ◽  
Low Density ◽  
Ion Milling ◽  
High Quality ◽  
Variable Angle ◽  
Major Disadvantage ◽  
Induced Defects

Due to the wealth of information, both analytical and structural that can be obtained from it TEM always has been a favorite tool for the analysis of process-induced defects in semiconductor wafers. The only major disadvantage has always been, that the volume under study in the TEM is relatively small, making it difficult to locate low density defects, and sample preparation is a somewhat lengthy procedure. This problem has been somewhat alleviated by the availability of efficient low angle milling.Using a PIPS® variable angle ion -mill, manufactured by Gatan, we have been consistently obtaining planar specimens with a high quality thin area in excess of 5 × 104 μm2 in about half an hour (milling time), which has made it possible to locate defects at lower densities, or, for defects of relatively high density, obtain information which is statistically more significant (table 1).

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