Microcrystalline silicon thin films studied using spectroscopic ellipsometry

2002 ◽  
Vol 92 (5) ◽  
pp. 2467-2474 ◽  
Author(s):  
T. D. Kang ◽  
Hosun Lee ◽  
S. J. Park ◽  
J. Jang ◽  
Soonil Lee
Keyword(s):  
Thin Films ◽  
Spectroscopic Ellipsometry ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films

scholarly journals Real time and ex situ spectroscopic ellipsometry analysis microcrystalline silicon thin films growth

2012 ◽  
Vol 61 (3) ◽  
pp. 036802
Author(s):  
Li Xin-Li ◽  
Gu Jin-Hua ◽  
Gao Hai-Bo ◽  
Chen Yong-Sheng ◽  
Gao Xiao-Yong ◽  
...  
Keyword(s):  
Thin Films ◽  
Real Time ◽  
Spectroscopic Ellipsometry ◽  
Ex Situ ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films

Effect of silane/hydrogen ratio on microcrystalline silicon thin films by remote inductively coupled plasma

2013 ◽  
Vol 113 (20) ◽  
pp. 203505 ◽  
Author(s):  
Y. N. Guo ◽  
D. Y. Wei ◽  
S. Q. Xiao ◽  
S. Y. Huang ◽  
H. P. Zhou ◽  
...  
Keyword(s):  
Thin Films ◽  
Inductively Coupled Plasma ◽  
Microcrystalline Silicon ◽  
Inductively Coupled ◽  
Silicon Thin Films
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