Numerical simulation of plasma immersion ion implantation for cubic target with finite length using three-dimensional particle-in-cell model

Wang Peng;  Tian Xiu-Bo;  Wang Zhi-Jian;  Gong Chun-Zhi;  Yang Shi-Qin

doi:10.7498/aps.60.085206

Numerical simulation of plasma immersion ion implantation for cubic target with finite length using three-dimensional particle-in-cell model

Acta Physica Sinica ◽

10.7498/aps.60.085206 ◽

2011 ◽

Vol 60 (8) ◽

pp. 085206

Author(s):

Wang Peng ◽

Tian Xiu-Bo ◽

Wang Zhi-Jian ◽

Gong Chun-Zhi ◽

Yang Shi-Qin

Keyword(s):

Numerical Simulation ◽

Ion Implantation ◽

Finite Length ◽

Cell Model ◽

Three Dimensional ◽

Particle In Cell ◽

Plasma Immersion Ion Implantation

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Particle-in-cell numerical simulation of non-uniform plasma immersion ion implantation

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2006.07.010 ◽

2007 ◽

Vol 201 (9-11) ◽

pp. 5458-5462 ◽

Cited By ~ 6

Author(s):

Y.X. Huang ◽

X.B. Tian ◽

S.Q. Yang ◽

Ricky K.Y. Fu ◽

Paul K. Chu

Keyword(s):

Numerical Simulation ◽

Ion Implantation ◽

Particle In Cell ◽

Plasma Immersion Ion Implantation ◽

Uniform Plasma

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Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/43/9/095203 ◽

2010 ◽

Vol 43 (9) ◽

pp. 095203 ◽

Cited By ~ 3

Author(s):

Dixon T K Kwok ◽

Jianhui Li ◽

Xiaobo Ma ◽

Paul K Chu

Keyword(s):

Ion Implantation ◽

Direct Current ◽

Electron Distribution ◽

Three Dimensional ◽

Hybrid Particle ◽

Particle In Cell ◽

Three Dimensional Objects ◽

Direct Current Plasma ◽

Plasma Immersion Ion Implantation

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Numerical Simulation of Metal Plasma Immersion Ion Implantation (MePIIID) on a Sharp Cone and a Fine Tip by a Multiple-Grid Particle-in-Cell (PIC) Method

IEEE Transactions on Plasma Science ◽

10.1109/tps.2006.883366 ◽

2006 ◽

Vol 34 (5) ◽

pp. 2434-2442 ◽

Cited By ~ 12

Author(s):

D.T.K. Kwok ◽

C. Cornet

Keyword(s):

Numerical Simulation ◽

Ion Implantation ◽

Particle In Cell ◽

Metal Plasma ◽

Plasma Immersion Ion Implantation ◽

Sharp Cone ◽

Pic Method

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Numerical simulation of enhanced glow discharge plasma immersion ion implantation using three-dimensional PIC/MC model

Acta Physica Sinica ◽

10.7498/aps.61.225203 ◽

2012 ◽

Vol 61 (22) ◽

pp. 225203

Author(s):

He Fu-Shun ◽

Li Liu-He ◽

Li Fen ◽

Dun Dan-Dan ◽

Tao Chan-Cai

Keyword(s):

Numerical Simulation ◽

Glow Discharge ◽

Ion Implantation ◽

Discharge Plasma ◽

Three Dimensional ◽

Glow Discharge Plasma ◽

Plasma Immersion Ion Implantation

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Numerical simulation of plasma immersion ion implantation of a finite-length cylindrical bore with auxiliary electrode by two-dimensional fluid model

25th Anniversary, IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221) ◽

10.1109/plasma.1998.677638 ◽

2002 ◽

Author(s):

T.K. Kwok ◽

T.E. Sheridan ◽

X.C. Zeng ◽

P.K. Chu

Keyword(s):

Numerical Simulation ◽

Ion Implantation ◽

Finite Length ◽

Fluid Model ◽

Two Dimensional ◽

Auxiliary Electrode ◽

Cylindrical Bore ◽

Plasma Immersion Ion Implantation

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3-D Numerical Simulation on Plasma Immersion Ion Implantation Batch Treating Process of Bearing Balls

IEEE Transactions on Plasma Science ◽

10.1109/tps.2016.2631547 ◽

2017 ◽

Vol 45 (1) ◽

pp. 39-42 ◽

Cited By ~ 1

Author(s):

Yonghao Yu ◽

Langping Wang ◽

Xiaofeng Wang ◽

Yang Lu

Keyword(s):

Numerical Simulation ◽

Ion Implantation ◽

Plasma Immersion Ion Implantation

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An Incompressible Three-Dimensional Multiphase Particle-in-Cell Model for Dense Particle Flows

Journal of Computational Physics ◽

10.1006/jcph.2001.6747 ◽

2001 ◽

Vol 170 (2) ◽

pp. 523-549 ◽

Cited By ~ 334

Author(s):

D.M. Snider

Keyword(s):

Cell Model ◽

Three Dimensional ◽

Dense Particle ◽

Particle In Cell ◽

Particle Flows

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Now or Never. Plasma Based Ion Implantation for Three-Dimensional Surface Modification and Process. Development of Plasma Sources for Plasma Immersion Ion Implantation.

The Journal of the Institute of Electrical Engineers of Japan ◽

10.1541/ieejjournal.121.308 ◽

2001 ◽

Vol 121 (5) ◽

pp. 308-311 ◽

Cited By ~ 1

Author(s):

YUICHI SETSUHARA

Keyword(s):

Surface Modification ◽

Ion Implantation ◽

Process Development ◽

Three Dimensional ◽

Plasma Sources ◽

Plasma Immersion Ion Implantation ◽

Dimensional Surface

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Numerical Simulation of Metal Plasma Immersion Ion Implantation and Deposition (MEPIIID) on a Sharp Cone and a Fine Tip

IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science ◽

10.1109/plasma.2005.359280 ◽

2005 ◽

Author(s):

Dixon T. K. Kwok ◽

Christophe Cornet

Keyword(s):

Numerical Simulation ◽

Ion Implantation ◽

Metal Plasma ◽

Plasma Immersion Ion Implantation ◽

Sharp Cone

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Particle-in-cell simulation of plasma immersion ion implantation (PIII) of industrial gears

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science (Cat. No.00CH37087) ◽

10.1109/plasma.2000.854642 ◽

2002 ◽

Author(s):

D.T.K. Kwok ◽

P.K. Chu

Keyword(s):

Ion Implantation ◽

Particle In Cell ◽

Cell Simulation ◽

Plasma Immersion Ion Implantation

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