Particle-in-cell simulation of plasma immersion ion implantation (PIII) of industrial gears

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science (Cat. No.00CH37087) ◽

10.1109/plasma.2000.854642 ◽

2002 ◽

Author(s):

D.T.K. Kwok ◽

P.K. Chu

Keyword(s):

Ion Implantation ◽

Particle In Cell ◽

Cell Simulation ◽

Plasma Immersion Ion Implantation

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Investigation of plasma immersion ion implantation of nickel-titanium rod by multiple-grid particle-in-cell simulation

Journal of Applied Physics ◽

10.1063/1.2890157 ◽

2008 ◽

Vol 103 (5) ◽

pp. 053308 ◽

Cited By ~ 4

Author(s):

Dixon T. K. Kwok ◽

Shuilin Wu ◽

Xiangmei Liu ◽

Ricky K. Y. Fu ◽

Paul K. Chu

Keyword(s):

Ion Implantation ◽

Nickel Titanium ◽

Particle In Cell ◽

Cell Simulation ◽

Plasma Immersion Ion Implantation

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Particle-in-cell simulation of an electron shock wave in a rapid rise time plasma immersion ion implantation process

Physics of Plasmas ◽

10.1063/1.1872894 ◽

2005 ◽

Vol 12 (4) ◽

pp. 043503 ◽

Cited By ~ 7

Author(s):

Albert Meige ◽

Mark Jarnyk ◽

Dixon T. K. Kwok ◽

Rod W. Boswell

Keyword(s):

Shock Wave ◽

Ion Implantation ◽

Rise Time ◽

Rapid Rise ◽

Particle In Cell ◽

Cell Simulation ◽

Implantation Process ◽

Plasma Immersion Ion Implantation

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Particle-in-cell numerical simulation of non-uniform plasma immersion ion implantation

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2006.07.010 ◽

2007 ◽

Vol 201 (9-11) ◽

pp. 5458-5462 ◽

Cited By ~ 6

Author(s):

Y.X. Huang ◽

X.B. Tian ◽

S.Q. Yang ◽

Ricky K.Y. Fu ◽

Paul K. Chu

Keyword(s):

Numerical Simulation ◽

Ion Implantation ◽

Particle In Cell ◽

Plasma Immersion Ion Implantation ◽

Uniform Plasma

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Application of particle-in-cell simulation to plasma source ion implantation

Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena ◽

10.1116/1.587365 ◽

1994 ◽

Vol 12 (2) ◽

pp. 884 ◽

Cited By ~ 27

Author(s):

Rickey Faehl

Keyword(s):

Ion Implantation ◽

Plasma Source ◽

Particle In Cell ◽

Plasma Source Ion Implantation ◽

Cell Simulation

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Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/43/9/095203 ◽

2010 ◽

Vol 43 (9) ◽

pp. 095203 ◽

Cited By ~ 3

Author(s):

Dixon T K Kwok ◽

Jianhui Li ◽

Xiaobo Ma ◽

Paul K Chu

Keyword(s):

Ion Implantation ◽

Direct Current ◽

Electron Distribution ◽

Three Dimensional ◽

Hybrid Particle ◽

Particle In Cell ◽

Three Dimensional Objects ◽

Direct Current Plasma ◽

Plasma Immersion Ion Implantation

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Two-dimensional particle-in-cell plasma immersion ion implantation simulation of gear/windmill geometry in cylindrical co-ordinates along the (r–θ) plane

Surface and Coatings Technology ◽

10.1016/s0257-8972(02)00130-5 ◽

2002 ◽

Vol 156 (1-3) ◽

pp. 97-102 ◽

Cited By ~ 12

Author(s):

D.T.K Kwok ◽

R.K.Y Fu ◽

P.K Chu

Keyword(s):

Ion Implantation ◽

Two Dimensional ◽

Particle In Cell ◽

Cell Plasma ◽

Plasma Immersion Ion Implantation

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Two-dimensional particle-in-cell simulation of the ion sheath dynamics in plasma source ion implantation of a hemispherical bowl-shaped target

Acta Physica Sinica ◽

10.7498/aps.57.6450 ◽

2008 ◽

Vol 57 (10) ◽

pp. 6450

Author(s):

Liu Cheng-Sen ◽

Wang De-Zhen ◽

Liu Tian-Wei ◽

Wang Yan-Hui

Keyword(s):

Ion Implantation ◽

Plasma Source ◽

Two Dimensional ◽

Particle In Cell ◽

Plasma Source Ion Implantation ◽

Cell Simulation

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Characteristics of plasma immersion ion implantation with a nanosecond rise-time pulse: particle-in-cell simulations

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/43/27/275201 ◽

2010 ◽

Vol 43 (27) ◽

pp. 275201 ◽

Cited By ~ 3

Author(s):

Jizhong Sun ◽

Chaofeng Sang ◽

Thomas Stirner ◽

Dezhen Wang

Keyword(s):

Ion Implantation ◽

Rise Time ◽

Particle In Cell ◽

Plasma Immersion Ion Implantation ◽

Time Pulse

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Numerical Simulation of Metal Plasma Immersion Ion Implantation (MePIIID) on a Sharp Cone and a Fine Tip by a Multiple-Grid Particle-in-Cell (PIC) Method

IEEE Transactions on Plasma Science ◽

10.1109/tps.2006.883366 ◽

2006 ◽

Vol 34 (5) ◽

pp. 2434-2442 ◽

Cited By ~ 12

Author(s):

D.T.K. Kwok ◽

C. Cornet

Keyword(s):

Numerical Simulation ◽

Ion Implantation ◽

Particle In Cell ◽

Metal Plasma ◽

Plasma Immersion Ion Implantation ◽

Sharp Cone ◽

Pic Method

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Particle-in-cell and Monte Carlo simulation of the hydrogen plasma immersion ion implantation process

Journal of Applied Physics ◽

10.1063/1.370974 ◽

1999 ◽

Vol 86 (4) ◽

pp. 1817-1821 ◽

Cited By ~ 29

Author(s):

Dixon Tat-Kun Kwok ◽

Paul K. Chu ◽

Blake P. Wood ◽

Chung Chan

Keyword(s):

Monte Carlo Simulation ◽

Monte Carlo ◽

Ion Implantation ◽

Hydrogen Plasma ◽

Particle In Cell ◽

Implantation Process ◽

Plasma Immersion Ion Implantation

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