scholarly journals An optical emission spectroscopy study on the high rate growth of microcrystalline silicon films

2009 ◽  
Vol 58 (2) ◽  
pp. 1344
Author(s):  
Han Xiao-Yan ◽  
Geng Xin-Hua ◽  
Hou Guo-Fu ◽  
Zhang Xiao-Dan ◽  
Li Gui-Jun ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Silicon Films ◽  
High Rate ◽  
Spectroscopy Study ◽  
Microcrystalline Silicon

Optical emission spectroscopy study toward high rate growth of microcrystalline silicon

2001 ◽  
Vol 386 (2) ◽  
pp. 256-260 ◽  
Author(s):  
Yusuke Fukuda ◽  
Yoshikazu Sakuma ◽  
Chisato Fukai ◽  
Yukihiro Fujimura ◽  
Kazufumi Azuma ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
High Rate ◽  
Spectroscopy Study ◽  
Microcrystalline Silicon

Optical emission spectroscopy study on deposition process of microcrystalline silicon

2006 ◽  
Vol 15 (11) ◽  
pp. 2713-2717 ◽  
Author(s):  
Wu Zhi-Meng ◽  
Lei Qing-Song ◽  
Geng Xin-Hua ◽  
Zhao Ying ◽  
Sun Jian ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Deposition Process ◽  
Spectroscopy Study ◽  
Microcrystalline Silicon

scholarly journals A study of Raman and optical emission spectroscopy on microcrystalline silicon films deposited by VHF-PECVD

2005 ◽  
Vol 54 (1) ◽  
pp. 445
Author(s):  
Zhang Xiao-Dan ◽  
Zhao Ying ◽  
Zhu Feng ◽  
Wei Chang-Chun ◽  
Wu Chun-Ya ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Silicon Films ◽  
Microcrystalline Silicon

scholarly journals Analysis on steady plasma process of high-rate microcrystalline silicon by optical emission spectroscopy

2013 ◽  
Vol 62 (16) ◽  
pp. 168103
Author(s):  
Fang Jia ◽  
Li Shuang-Liang ◽  
Xu Sheng-Zhi ◽  
Wei Chang-Chun ◽  
Zhao Ying ◽  
...  
Keyword(s):  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
High Rate ◽  
Plasma Process ◽  
Microcrystalline Silicon

Process control of high rate microcrystalline silicon based solar cell deposition by optical emission spectroscopy

2008 ◽  
Vol 516 (14) ◽  
pp. 4633-4638 ◽  
Author(s):  
T. Kilper ◽  
M.N. van den Donker ◽  
R. Carius ◽  
B. Rech ◽  
G. Bräuer ◽  
...  
Keyword(s):  
Solar Cell ◽  
Process Control ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
High Rate ◽  
Microcrystalline Silicon ◽  
Silicon Based
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