Epitaxial growth of high quality TiN thin film on Si by laser molecular beam epitaxy
Keyword(s):
Keyword(s):
Keyword(s):
2017 ◽
Vol 10
(04)
◽
pp. 1750036
◽
Keyword(s):
1992 ◽
Vol 118
(3-4)
◽
pp. 299-303
◽
Keyword(s):
Keyword(s):
2001 ◽
Vol 229
(1-4)
◽
pp. 208-211
◽
Keyword(s):
2001 ◽
Vol 44
(7)
◽
pp. 947-952
◽
Keyword(s):
Keyword(s):