An in situ method for characterizing the kinetics of the oxidation process of copper thin films via sheet resistance
2018 ◽
Vol 7
(1)
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pp. 17-24
Keyword(s):
Keyword(s):
2015 ◽
Vol 7
(32)
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pp. 17874-17883
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2019 ◽
Vol 90
(3)
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pp. 035111
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Keyword(s):
1994 ◽
Vol 79-80
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pp. 459-464
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2015 ◽
Vol 55
(3)
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pp. 932-935
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