scholarly journals MAGNETIC FIELD ASSISTED MICROWAVE PLASMA AND LARGE AREA DIAMOND FILM DEPOSITION

1990 ◽  
Vol 39 (10) ◽  
pp. 1635
Author(s):  
SONG RU-AN ◽  
CHENG XIAN-AN ◽  
ZHOU ZHONG-YI
Keyword(s):  
Magnetic Field ◽  
Diamond Film ◽  
Microwave Plasma ◽  
Film Deposition ◽  
Large Area

Application of High Power DC Arc Plasma for Mass Production of High Quality Freestanding Diamond Films and Diamond Film Coated Cutting Tools

2010 ◽  
Vol 654-656 ◽  
pp. 1694-1699
Author(s):  
Fan Xiu Lu ◽  
Cheng Ming Li ◽  
Yu Mei Tong ◽  
Wei Zhong Tang ◽  
Guang Chao Chen ◽  
...  
Keyword(s):  
High Power ◽  
Diamond Film ◽  
Mass Production ◽  
Cutting Tools ◽  
Diamond Films ◽  
Film Deposition ◽  
Arc Plasma ◽  
Large Area ◽  
High Quality ◽  
Dc Arc

As quasi-thermodynamic equilibrium plasma, DC Arc Plasma has the advantage of very high gas temperature and thus the very high degree of activation of the precursors for diamond film deposition. The present paper reviews the progresses in the R&D of the novel high power dc arc plasma jet CVD system with rotating arc and operated at gas recycling mode for large area high quality diamond film deposition, developed at the University of Science and Technology Beijing (USTB) in the mid 1990s of the 20th century. Thanks to the continuous efforts made in the technological improvement in the past 15 years, considerable progresses have been achieved in the commercialization of this high power dc arcjet CVD system, which is now capable of mass production of large area high quality freestanding diamond films for optical, thermal, and mechanical (tool) applications. The present status in the commercialization and the property level of the resultant diamond films in optical, thermal, mechanical, dielectric, oxidation resistance, sand erosion resistance, and laser damage threshold etc. are presented. Based on the same high power dc arcjet technology, a novel high current extended dc arc plasma (HCEDCA) CVD system has been developed which successfully changed the diamond film deposition mode from 2D planar deposition in to 3D deposition (as confined by two hollow (virtue) columns). It is demonstrated to be advantageous for mass production of diamond thin film coated WC-Co cutting tools. Recent results in the R&D of thin diamond film coated WC-Co drills and end mills, and the results in field tests are discussed.

A compact ellipsoidal cavity type microwave plasma reactor for diamond film deposition

2011 ◽  
Vol 20 (3) ◽  
pp. 374-379 ◽  
Author(s):  
X.J. Li ◽  
W.Z. Tang ◽  
F.Y. Wang ◽  
C.M. Li ◽  
L.F. Hei ◽  
...  
Keyword(s):  
Diamond Film ◽  
Microwave Plasma ◽  
Plasma Reactor ◽  
Film Deposition ◽  
Ellipsoidal Cavity

Microcrystalline and Nanocrystalline Diamond Film Deposition on Cobalt Chrome Alloy

1999 ◽  
Vol 594 ◽  
Author(s):  
Marc D. Fries ◽  
Yogesh K. Vohra
Keyword(s):  
Diamond Film ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Film Deposition ◽  
Nanocrystalline Diamond ◽  
Plasma Chemical Vapor Deposition ◽  
High Thermal Expansion ◽  
Cobalt Chrome Alloy ◽  
Cobalt Chrome

AbstractThe cobalt chrome alloy Co-28Cr-6Mo is widely used in human joint replacement applications. These joints are highly sensitive to wear and are usually replaced after approximately ten years of use. In order to extend these implants' service lifetimes, a thin film of diamond may be applied to the implant wear surfaces by microwave plasma chemical vapor deposition (MPCVD) following MPCVD nitridation. Diamond films often delaminate from cobalt chrome due to a high thermal expansion mismatch. Additionally, under most conditions diamond films degrade into graphite by dissolution of nuclei into solvents like Co and Cr. By nitriding the cobalt chrome through MPCVD prior to diamond deposition, a usable diamond film may be achieved. It may be possible to merge both the nitriding and deposition steps into a single process, since both nitridation and deposition will be performed by MPCVD. In addition, controlled amounts of nitrogen in hydrogen/methane plasma under CVD conditions result in a nanostructured diamond coating. We have investigated the formation of both micro- and nanocrystalline diamond formation on cobalt chrome.

Large area high quality diamond film deposition by high power DC arc plasma jet operating at gas recycling mode

2001 ◽  
Vol 10 (9-10) ◽  
pp. 1551-1558 ◽  
Author(s):  
F.X. Lu ◽  
W.Z. Tang ◽  
T.B. Huang ◽  
J.M. Liu ◽  
J.H. Song ◽  
...  
Keyword(s):  
High Power ◽  
Diamond Film ◽  
Plasma Jet ◽  
Film Deposition ◽  
Arc Plasma ◽  
Large Area ◽  
High Quality ◽  
Dc Arc ◽  
Gas Recycling

Optical and mass spectroscopy measurements of Ar/CH4/H2 microwave plasma for nano-crystalline diamond film deposition

2007 ◽  
Vol 16 (4-7) ◽  
pp. 675-678 ◽  
Author(s):  
Haiyang Zhou ◽  
Jun Watanabe ◽  
Masato Miyake ◽  
Akihisa Ogino ◽  
Masaaki Nagatsu ◽  
...  
Keyword(s):  
Mass Spectroscopy ◽  
Diamond Film ◽  
Microwave Plasma ◽  
Film Deposition ◽  
Nano Crystalline
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