A compact ellipsoidal cavity type microwave plasma reactor for diamond film deposition

2011 ◽  
Vol 20 (3) ◽  
pp. 374-379 ◽  
Author(s):  
X.J. Li ◽  
W.Z. Tang ◽  
F.Y. Wang ◽  
C.M. Li ◽  
L.F. Hei ◽  
...  
Keyword(s):  
Diamond Film ◽  
Microwave Plasma ◽  
Plasma Reactor ◽  
Film Deposition ◽  
Ellipsoidal Cavity

scholarly journals MAGNETIC FIELD ASSISTED MICROWAVE PLASMA AND LARGE AREA DIAMOND FILM DEPOSITION

1990 ◽  
Vol 39 (10) ◽  
pp. 1635
Author(s):  
SONG RU-AN ◽  
CHENG XIAN-AN ◽  
ZHOU ZHONG-YI
Keyword(s):  
Magnetic Field ◽  
Diamond Film ◽  
Microwave Plasma ◽  
Film Deposition ◽  
Large Area

Influence of process parameters on diamond film CVD in a surface-wave driven microwave plasma reactor

1996 ◽  
Vol 274 (1-2) ◽  
pp. 3-17 ◽  
Author(s):  
Carlos F.M. Borges ◽  
Louis St-Onge ◽  
Michel Moisan ◽  
Alix Gicquel
Keyword(s):  
Surface Wave ◽  
Process Parameters ◽  
Diamond Film ◽  
Microwave Plasma ◽  
Plasma Reactor ◽  
Influence Of Process Parameters

Microcrystalline and Nanocrystalline Diamond Film Deposition on Cobalt Chrome Alloy

1999 ◽  
Vol 594 ◽  
Author(s):  
Marc D. Fries ◽  
Yogesh K. Vohra
Keyword(s):  
Diamond Film ◽  
Microwave Plasma ◽  
Diamond Films ◽  
Chemical Vapor ◽  
Film Deposition ◽  
Nanocrystalline Diamond ◽  
Plasma Chemical Vapor Deposition ◽  
High Thermal Expansion ◽  
Cobalt Chrome Alloy ◽  
Cobalt Chrome

AbstractThe cobalt chrome alloy Co-28Cr-6Mo is widely used in human joint replacement applications. These joints are highly sensitive to wear and are usually replaced after approximately ten years of use. In order to extend these implants' service lifetimes, a thin film of diamond may be applied to the implant wear surfaces by microwave plasma chemical vapor deposition (MPCVD) following MPCVD nitridation. Diamond films often delaminate from cobalt chrome due to a high thermal expansion mismatch. Additionally, under most conditions diamond films degrade into graphite by dissolution of nuclei into solvents like Co and Cr. By nitriding the cobalt chrome through MPCVD prior to diamond deposition, a usable diamond film may be achieved. It may be possible to merge both the nitriding and deposition steps into a single process, since both nitridation and deposition will be performed by MPCVD. In addition, controlled amounts of nitrogen in hydrogen/methane plasma under CVD conditions result in a nanostructured diamond coating. We have investigated the formation of both micro- and nanocrystalline diamond formation on cobalt chrome.

Optical and mass spectroscopy measurements of Ar/CH4/H2 microwave plasma for nano-crystalline diamond film deposition

2007 ◽  
Vol 16 (4-7) ◽  
pp. 675-678 ◽  
Author(s):  
Haiyang Zhou ◽  
Jun Watanabe ◽  
Masato Miyake ◽  
Akihisa Ogino ◽  
Masaaki Nagatsu ◽  
...  
Keyword(s):  
Mass Spectroscopy ◽  
Diamond Film ◽  
Microwave Plasma ◽  
Film Deposition ◽  
Nano Crystalline

A circumferential antenna ellipsoidal cavity type MPCVD reactor developed for diamond film deposition

2015 ◽  
Vol 51 ◽  
pp. 24-29 ◽  
Author(s):  
Y.F. Li ◽  
J.J. Su ◽  
Y.Q. Liu ◽  
M.H. Ding ◽  
G. Wang ◽  
...  
Keyword(s):  
Diamond Film ◽  
Film Deposition ◽  
Ellipsoidal Cavity

Design of novel plasma reactor for diamond film deposition

2011 ◽  
Vol 20 (4) ◽  
pp. 480-484 ◽  
Author(s):  
X.J. Li ◽  
W.Z. Tang ◽  
S.W. Yu ◽  
S.K. Zhang ◽  
G.C. Chen ◽  
...  
Keyword(s):  
Diamond Film ◽  
Plasma Reactor ◽  
Film Deposition
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