scholarly journals CW CO2-LASER ANNEALING AND ALLOYING OF SEMICONDUCTORS

1982 ◽  
Vol 31 (8) ◽  
pp. 1038
Author(s):  
ZOU SHI-CHANG ◽  
LIN CHENG-LU
Keyword(s):  
Co2 Laser ◽  
Laser Annealing ◽  
Cw Co2 Laser

Front and back surface cw CO2-laser annealing of arsenic ion-implanted silicon

1980 ◽  
Vol 23 (2) ◽  
pp. 163-168 ◽  
Author(s):  
S. C. Tsou ◽  
P. H. Tsien ◽  
M. Takai ◽  
D. Röschenthaler ◽  
M. Ramin ◽  
...  
Keyword(s):  
Co2 Laser ◽  
Laser Annealing ◽  
Back Surface ◽  
Cw Co2 Laser ◽  
Ion Implanted

CW CO2-laser annealing of arsenic implanted silicon

1980 ◽  
Vol 22 (2) ◽  
pp. 129-136 ◽  
Author(s):  
M. Takai ◽  
P. H. Tsien ◽  
S. C. Tsou ◽  
D. Röschenthaler ◽  
M. Ramin ◽  
...  
Keyword(s):  
Co2 Laser ◽  
Laser Annealing ◽  
Cw Co2 Laser

Investigations on cw CO2-laser induced welding plasmas using differential interferometry

1999 ◽  
Author(s):  
Henrik Schittenhelm ◽  
Jürgen Müller ◽  
Peter Berger ◽  
Helmut Hügel
Keyword(s):  
Co2 Laser ◽  
Differential Interferometry ◽  
Cw Co2 Laser

Spatial temperature distribution in CW CO2 laser photosensitized reactions

1984 ◽  
Vol 49 (6) ◽  
pp. 1354-1359 ◽  
Author(s):  
Pavel Kubát ◽  
Josef Pola
Keyword(s):  
Temperature Distribution ◽  
Chemical Reactions ◽  
Co2 Laser ◽  
Computational Procedure ◽  
Heat Convection ◽  
Inert Gas ◽  
Spatial Temperature Distribution ◽  
Cw Co2 Laser ◽  
Spatial Temperature

The temperature distribution in gaseous SF6 and SF6-inert gas samples under irradiation with cw CO2 laser measured by a thermocouple technique is confronted with the results of a computational procedure neglecting heat convection. The results are helpful in understanding the effect of the inert gas on the distribution of temperature and the size of the reacting hot volume in the cw laser-photosensitized chemical reactions.

Cw CO2 laser driven oxidation of some perhalogenocycloalkenes

1991 ◽  
Vol 56 (2) ◽  
pp. 398-405 ◽  
Author(s):  
Josef Pola ◽  
Jaroslav Včelák ◽  
Zdeněk Chvátal
Keyword(s):  
Co2 Laser ◽  
Total Pressure ◽  
Diels Alder ◽  
Title Reaction ◽  
Consecutive Reactions ◽  
Cw Co2 Laser

The title reaction of hexafluorocyclobutene, 1,2-dichloro-3,3,4,4-tetrafluorocyclobutene and decafluorocyclohexene studied at total pressure 13.3 and 16 kPa yield oxalyl halides COX.COX (X = F, Cl) and C2F4 that undergo consecutive reactions to COF2, CO and X2. The oxidation of decafluorocyclohexene is preceded by retro-Diels-Alder decomposition affording hexafluorocyclobutene and C2F4. Two alternative mechanisms for the oxidation of the cyclobutenes are presented, one involving a novel cleavage of intermediary bicyclic dioxetanes. The decomposition of oxalyl fluoride into COF2 and CO is favored over its oxidation.

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