Front and back surface cw CO2-laser annealing of arsenic ion-implanted silicon

1980 ◽  
Vol 23 (2) ◽  
pp. 163-168 ◽  
Author(s):  
S. C. Tsou ◽  
P. H. Tsien ◽  
M. Takai ◽  
D. Röschenthaler ◽  
M. Ramin ◽  
...  
Keyword(s):  
Co2 Laser ◽  
Laser Annealing ◽  
Back Surface ◽  
Cw Co2 Laser ◽  
Ion Implanted

Pulsed excimer and CO2 laser annealing of ion‐implanted silicon

1985 ◽  
Vol 3 (4) ◽  
pp. 1836-1838 ◽  
Author(s):  
J. Narayan ◽  
R. B. James ◽  
O. W. Holland ◽  
M. J. Aziz
Keyword(s):  
Co2 Laser ◽  
Laser Annealing ◽  
Ion Implanted

scholarly journals CW CO2-LASER ANNEALING AND ALLOYING OF SEMICONDUCTORS

1982 ◽  
Vol 31 (8) ◽  
pp. 1038
Author(s):  
ZOU SHI-CHANG ◽  
LIN CHENG-LU
Keyword(s):  
Co2 Laser ◽  
Laser Annealing ◽  
Cw Co2 Laser

CO2 laser annealing of ion–implanted silicon

1979 ◽  
Author(s):  
G. K. Celler ◽  
R. Borutta ◽  
W. L. Brown ◽  
J. M. Poate ◽  
G. A. Rozgonyi ◽  
...  
Keyword(s):  
Co2 Laser ◽  
Laser Annealing ◽  
Ion Implanted

CW CO2-laser annealing of arsenic implanted silicon

1980 ◽  
Vol 22 (2) ◽  
pp. 129-136 ◽  
Author(s):  
M. Takai ◽  
P. H. Tsien ◽  
S. C. Tsou ◽  
D. Röschenthaler ◽  
M. Ramin ◽  
...  
Keyword(s):  
Co2 Laser ◽  
Laser Annealing ◽  
Cw Co2 Laser
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