scholarly journals Amorphous, Polymorphous, and Microcrystalline Silicon Thin Films Deposited by Plasma at Low Temperatures

10.5772/63522 ◽  
2016 ◽  
Author(s):  
Mario Moreno ◽  
Miguel Domínguez ◽  
Roberto Ambrosio ◽  
Arturo Torres ◽  
Alfonso Torres ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperatures ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films

Effect of silane/hydrogen ratio on microcrystalline silicon thin films by remote inductively coupled plasma

2013 ◽  
Vol 113 (20) ◽  
pp. 203505 ◽  
Author(s):  
Y. N. Guo ◽  
D. Y. Wei ◽  
S. Q. Xiao ◽  
S. Y. Huang ◽  
H. P. Zhou ◽  
...  
Keyword(s):  
Thin Films ◽  
Inductively Coupled Plasma ◽  
Microcrystalline Silicon ◽  
Inductively Coupled ◽  
Silicon Thin Films

New two-step growth of microcrystalline silicon thin films without incubation layer

2011 ◽  
Vol 322 (1) ◽  
pp. 1-5 ◽  
Author(s):  
Hongyun Yue ◽  
Aimin Wu ◽  
Xueyu Zhang ◽  
Tingju Li
Keyword(s):  
Thin Films ◽  
Microcrystalline Silicon ◽  
Silicon Thin Films ◽  
Step Growth
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