scholarly journals Oriented Lateral Growth and Defects in Polycrystalline-Silicon Thin Films on Glass Substrates

10.5772/37040 ◽  
2012 ◽  
Author(s):  
Kuninori Kitahara ◽  
Akito Har
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
Lateral Growth ◽  
Glass Substrates ◽  
Silicon Thin Films

scholarly journals Effect of Halogen on the Structure of Low Temperature Polycrystalline Silicon Thin Films Fabricated on Glass Substrates.

1999 ◽  
Vol 107 (1251) ◽  
pp. 1099-1104 ◽  
Author(s):  
Toshio KAMIYA ◽  
Yoshiteru MAEDA ◽  
Kouichi NAKAHATA ◽  
Takashi KOMARU ◽  
Charles M. FORTMANN ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Polycrystalline Silicon ◽  
Glass Substrates ◽  
Silicon Thin Films

Activation of ion-implanted polycrystalline silicon thin films prepared on glass substrates

2012 ◽  
Vol 47 (10) ◽  
pp. 3048-3051 ◽  
Author(s):  
Byoung-Soo So ◽  
Seung-Muk Bae ◽  
Yil-Hwan You ◽  
Young-Hwan Kim ◽  
Jin-Ha Hwang
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
Glass Substrates ◽  
Silicon Thin Films ◽  
Ion Implanted

Fabrication of polycrystalline silicon thin films on glass substrates using fiber laser crystallization

2009 ◽  
Vol 517 (14) ◽  
pp. 3971-3974 ◽  
Author(s):  
Vinh Ai Dao ◽  
Kuymin Han ◽  
Jongkyu Heo ◽  
Dohyeon Kyeong ◽  
Jaehong Kim ◽  
...  
Keyword(s):  
Thin Films ◽  
Fiber Laser ◽  
Polycrystalline Silicon ◽  
Laser Crystallization ◽  
Glass Substrates ◽  
Silicon Thin Films

In situ excimer laser irradiation as cleaning tool for solid phase epitaxy of laser crystallized polycrystalline silicon thin films

2013 ◽  
Vol 210 (12) ◽  
pp. 2729-2735 ◽  
Author(s):  
Ingmar Höger ◽  
Thomas Schmidt ◽  
Anja Landgraf ◽  
Martin Schade ◽  
Annett Gawlik ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Solid Phase ◽  
Solid Phase Epitaxy ◽  
Silicon Thin Films ◽  
Excimer Laser Irradiation
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