Nitridation of GaAs Surface by Low Energy Ion Implantation with In Situ Control of Chemical Composition
2013 ◽
Vol 53
(1)
◽
pp. 56-62
◽
Keyword(s):
1978 ◽
Vol 36
(3)
◽
pp. 615-626
Keyword(s):
1992 ◽
Vol 50
(2)
◽
pp. 1352-1353
Keyword(s):