In situ control of the desorption process of GaAs surface native oxide by direct Ga beam irradiation

2003 ◽  
Author(s):  
Y. Asaoka ◽  
T. Kanebishi ◽  
N. Sano ◽  
T. Kaneko
Keyword(s):  
Gaas Surface ◽  
Native Oxide ◽  
Beam Irradiation ◽  
Desorption Process ◽  
In Situ Control

Corrigendum to “desorption process of GaAs surface native oxide controlled by direct Ga beam irradiation”

2003 ◽  
Vol 255 (3-4) ◽  
pp. 419
Author(s):  
Yasushi Asaoka ◽  
Takuji Kanebishi ◽  
Naokatsu Sano ◽  
Tadaaki Kaneko
Keyword(s):  
Gaas Surface ◽  
Native Oxide ◽  
Beam Irradiation ◽  
Desorption Process

In Situ Control of Native Oxide Growth for Semiconductor Processes

1992 ◽  
Vol 259 ◽  
Author(s):  
Mizuho Morita ◽  
Tadahiro Ohmi
Keyword(s):  
Film Formation ◽  
Molecular Layer ◽  
Chemical Vapor ◽  
Native Oxide ◽  
Molecular Flow ◽  
Oxide Growth ◽  
Temperature Ramp ◽  
In Situ Control ◽  
Si Films

ABSTRACTIn situ control methods of native oxide growth on Si surfaces at room temperature and during the temperature ramp-up are proposed for metal/Si contact formation, lowtemperature Si epitaxy, and very-thin thermal oxide film formation, based on analyses of factors dominating the oxide growth. Low-resistance W/Si contacts are formed by N2 gas sealed processing of HF cleaning right before W chemical vapor deposition(CVD). Highquality epitaxial Si films are grown at a low temperature of 550°C using Si2H6 molecular flow pre-showering to suppress the oxide growth caused by water or oxygen in a CVD reactor. Very thin gate oxide films with high insulating performance are realized by the preoxidation step at 300°C to form one-molecular-layer oxide for passivation and by the subsequent temperature ramp-up step in ultraclean Ar gas to prevent oxide growth and an increase of surface microroughness before the thermal oxidation step.

In situ TEM observation of novel chemical evolution of MnBr2 catalyzed by Cu under electron beam irradiation

2017 ◽  
Vol 686 ◽  
pp. 44-48 ◽  
Author(s):  
Wei Wang ◽  
Xianwei Bai ◽  
Xiangxiang Guan ◽  
Xi Shen ◽  
Yuan Yao ◽  
...  
Keyword(s):  
Electron Beam ◽  
Chemical Evolution ◽  
Electron Beam Irradiation ◽  
In Situ Tem ◽  
Beam Irradiation

scholarly journals Electrochemical bubble generation via hydrazine oxidation for the in situ control of an electrodeposited conducting polymer micro/-nanostructure

RSC Advances ◽  
2021 ◽  
Vol 11 (18) ◽  
pp. 11020-11025
Author(s):  
David Possetto ◽  
Luciana Fernández ◽  
Gabriela Marzari ◽  
Fernando Fungo
Keyword(s):  
Conducting Polymer ◽  
Electrochemical Method ◽  
Bubble Generation ◽  
Hydrazine Oxidation ◽  
In Situ Control

An electrochemical method to manipulate the size and density of electrodeposited polypyrrole structures at the micro-nanoscale by the discharge of hydrazine.

In situ manipulation of E-beam irradiation-induced nanopore formation on molybdenum oxide nanowires

2021 ◽  
Vol 544 ◽  
pp. 148874
Author(s):  
Yi-Hsin Ting ◽  
Min-Ci Wu ◽  
Yoshitaka Aoyama ◽  
Kuo-Chang Lu ◽  
Wen-Wei Wu
Keyword(s):  
Molybdenum Oxide ◽  
Beam Irradiation ◽  
Oxide Nanowires

In-situ control of on-chip angstrom gaps, atomic switches, and molecular junctions by light irradiation

Nano Today ◽  
2021 ◽  
Vol 39 ◽  
pp. 101226
Author(s):  
Surong Zhang ◽  
Chenyang Guo ◽  
Lifa Ni ◽  
Kerstin M. Hans ◽  
Weiqiang Zhang ◽  
...  
Keyword(s):  
Molecular Junctions ◽  
Light Irradiation ◽  
In Situ Control ◽  
On Chip
Sign in / Sign up

Export Citation Format

Share Document