Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam
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1997 ◽
Vol 15
(5)
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pp. 1805
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2006 ◽
Vol 45
(10A)
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pp. 8020-8023
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2015 ◽
Vol 135
(2)
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pp. 168-173
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2019 ◽
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