Recent Developments on Silicon Carbide Thin Films for Piezoresistive Sensors Applications
2009 ◽
Vol 14
(2)
◽
pp. 142-152
◽
Keyword(s):
Keyword(s):
Low Temperature (320°C) Deposition of Hydrogenated Microcrystalline Cubic Silicon Carbide Thin Films
2004 ◽
Vol 457-460
◽
pp. 317-320
◽
1991 ◽
Vol 38
(3)
◽
pp. 231-234
◽
Keyword(s):
2003 ◽
Vol 17
(09)
◽
pp. 387-392
◽
2012 ◽
Vol 24
(4)
◽
pp. 1361-1368
◽