scholarly journals The Growth of Semiconductor Thin Films Studied by RHEED

1990 ◽  
Vol 43 (5) ◽  
pp. 583
Author(s):  
GL Price
Keyword(s):  
Thin Films ◽  
Surface Science ◽  
High Vacuum ◽  
High Energy ◽  
Ultra High Vacuum ◽  
Large Area ◽  
Growth Modes ◽  
Semiconductor Thin Films ◽  
Wide Range ◽  
Recent Developments

Recent developments in the growth of semiconductor thin films are reviewed. The emphasis is on growth by molecular beam epitaxy (MBE). Results obtained by reflection high energy electron diffraction (RHEED) are employed to describe the different kinds of growth processes and the types of materials which can be constructed. MBE is routinely capable of heterostructure growth to atomic precision with a wide range of materials including III-V, IV, II-VI semiconductors, metals, ceramics such as high Tc materials and organics. As the growth proceeds in ultra high vacuum, MBE can take advantage of surface science techniques such as Auger, RHEED and SIMS. RHEED is the essential in-situ probe since the final crystal quality is strongly dependent on the surface reconstruction during growth. RHEED can also be used to calibrate the growth rate, monitor growth kinetics, and distinguish between various growth modes. A major new area is lattice mismatched growth where attempts are being made to construct heterostructures between materials of different lattice constants such as GaAs on Si. Also described are the new techniques of migration enhanced epitaxy and tilted superlattice growth. Finally some comments are given On the means of preparing large area, thin samples for analysis by other techniques from MBE grown films using capping, etching and liftoff.

Modifications of a JEOL 2000EX TEM for insSitu surface studies

1993 ◽  
Vol 51 ◽  
pp. 640-641
Author(s):  
Michael T. Marshall ◽  
Xianghong Tong ◽  
J. Murray Gibson
Keyword(s):  
Electron Diffraction ◽  
Surface Science ◽  
Film Growth ◽  
High Vacuum ◽  
High Energy ◽  
Energy Electron ◽  
Ultra High Vacuum ◽  
Transmission Electron ◽  
Fundamental Insight

We have modified a JEOL 2000EX Transmission Electron Microscope (TEM) to allow in-situ ultra-high vacuum (UHV) surface science experiments as well as transmission electron diffraction and imaging. Our goal is to support research in the areas of in-situ film growth, oxidation, and etching on semiconducter surfaces and, hence, gain fundamental insight of the structural components involved with these processes. The large volume chamber needed for such experiments limits the resolution to about 30 Å, primarily due to electron optics. Figure 1 shows the standard JEOL 2000EX TEM. The UHV chamber in figure 2 replaces the specimen area of the TEM, as shown in figure 3. The chamber is outfitted with Low Energy Electron Diffraction (LEED), Auger Electron Spectroscopy (AES), Residual Gas Analyzer (RGA), gas dosing, and evaporation sources. Reflection Electron Microscopy (REM) is also possible. This instrument is referred to as SHEBA (Surface High-energy Electron Beam Apparatus).The UHV chamber measures 800 mm in diameter and 400 mm in height. JEOL provided adapter flanges for the column.

Using a Moderate Vacuum, Hot/Cryo-Stage Equipped AFM for In-Situ Observation of α-Phase Growth In 60SN40PB Hypoeutectic Solder

1998 ◽  
Vol 4 (S2) ◽  
pp. 316-317
Author(s):  
D. N. Leonard ◽  
P.E. Russell
Keyword(s):  
Surface Science ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
Scanning Tunneling ◽  
In Situ Observation ◽  
Atmospheric Conditions ◽  
Tunneling Microscopy ◽  
Wide Range ◽  
Gas Environment

Atomic force microscopy (AFM) was introduced in 1984, and proved to be more versatile than scanning tunneling microscopy (STM) due to the AFM's capabilities to scan non-conductive samples under atmospheric conditions and achieve atomic resolution. Ultra high vacuum (UHV) AFM has been used in surface science applications when control of oxidation and corrosion of a sample's surface are required. Expensive equipment and time consuming sample exchanges are two drawbacks of the UHV AFM system that limit its use. Until recently, no hot/cryo-stage, moderate vacuum, controlled gas environment AFM was commonly available.We have demonstrated that phase transformations are easily observable in metal alloys and polymers with the use of a moderate vacuum AFM that has in-situ heating/cooling capabilities and quick (within minutes) sample exchange times. This talk will describe the results of experiments involving a wide range of samples designed to make use of the full capabilities of a hot/cryo-stage, controlled gas environment AFM.

Effect of the Er3+ Concentration on the Luminescence of Ca1-xErxF2+x Thin Films Epitaxially Grown on Si(100)

1993 ◽  
Vol 298 ◽  
Author(s):  
A.S. Barriere ◽  
S. Raoux ◽  
P.N. Favennec ◽  
H. L'haridon ◽  
D. Moutonnet
Keyword(s):  
Thin Films ◽  
Solid Solution ◽  
Substitution Rate ◽  
High Vacuum ◽  
High Energy ◽  
Ultra High Vacuum ◽  
Visible Range ◽  
Doped Semiconductors ◽  
Potential Applications ◽  
Er Doped

AbstractCa1-xErxF2+x thin films, with a substitution rate, x, varying from 1 to 20%, were deposited on Si(100) substrates by sublimation of high purity solid solution powders under ultra-high-vacuum. Rutherford backscattering studies have shown that the films have the composition of the initial solid solution powders, are quite homogeneous and are epitaxially grown on the substrates.The optical properties of these films were studied by means of cathodoluminescence and photoluminescence. At room temperature, the emissions due to the de-excitations from the 4S3/2, 4F9/2, 4I11/2 and 4I13/2 excited levels to the 4I15/2 ground state of Er3+ (4f11) ions are easily detected (λ = 0.548, 0.66, 0.98 and 1.53 μm)The strong 1.53 μm infrared luminescence, which presents evident potential applications for optical communications, is maximum for an erbium substitution rate included between 15 and 17%. These Er concentrations are three or four orders of magnitude greater than the optimum ones in the case of Er-doped semiconductors, which are close to 1018 cm-3. In the visible range, the luminescences are also important.They allow us to detect high energy ion or electron beams. However their maximum efficiencies were observed for a relatively low erbium concentration, close to 1%. These different behaviours are explained by the cross relaxation phenomena, which depopulate the higher levels to the benefit of the 4I13/2 → 4I15/2 transition.The energy distribution of the Stark sublevels of the 4I15/2 state, which results from crystal field splitting, was deduced from a photoluminescence study at 2K. The obtained results show that the environment of the luminescent centres does not change with the erbium concentration.At last, it must be noted that the refractive index of the layers increases with the erbium concentration, leading to the realization of optical guides. Consequently opto-electronic components could be developed from such erbium doped heterostructures.

Analysis of Growing Films of Complex Oxides by RHEED

MRS Bulletin ◽  
1995 ◽  
Vol 20 (5) ◽  
pp. 32-38 ◽  
Author(s):  
Ivan Bozovic ◽  
J.N. Eckstein
Keyword(s):  
Thin Films ◽  
Electron Diffraction ◽  
High Temperature Superconductivity ◽  
High Vacuum ◽  
Film Surface ◽  
Complex Oxides ◽  
High Energy ◽  
Ultra High Vacuum ◽  
Metallic Oxide ◽  
Oxide Deposition

The majority of sophisticated ultra-high-vacuum (UHV) systems for deposition of thin films, such as molecular beam epitaxy (MBE) machines, contain some kind of electron diffraction apparatus which is used to scrutinize the surface structure of the film while it is grown. Reflection high energy electron diffraction (RHEED) is probably the most frequently employed configuration. An excellent introduction to RHEED, including a treatment of electron diffraction, reciprocal-space description, reflection from imperfect surfaces, etc., was recently published in the MRS Bulletin by Lagally and Savage. Hence, we will not review these basics here. Rather, we will assume the reader to be familiar with that article, and will refer to it as LS.The materials discussed in LS include Si, Ge on Si, and GaAs. The applications of MBE for synthesis of semiconductor thin films and heterostructures are widely recognized. MRS has recently bestowed its greatest honor, the Von Hippel Award, to Alfred Y. Cho for his pioneering work on MBE synthesis of GaAs and its application to new devices.In contrast, here we focus on complex oxides—cuprates, titanates, manganates, etc. This is a relatively new area of application for both MBE and RHEED. Actually, it was only after the discovery of high-temperature superconductivity (HTS) that many MBE systems were designed and built specifically for metallic oxide deposition. More recently, some of these machines have also been employed to synthesize other interesting oxides, for example, ferroelectrics and ferromagnets. In all these studies, RHEED has been the principal diagnostic tool and source of information about the growing film surface.

Effect of The Er3+ Concentration On The Luminescence of Ca1−xErxF2+x Thin Films Epitaxially Grown On Si(100)

1993 ◽  
Vol 301 ◽  
Author(s):  
A.S. Barriere ◽  
S. Raoux ◽  
P.N. Favennec ◽  
H. L'haridon ◽  
D. Moutonnet
Keyword(s):  
Thin Films ◽  
Solid Solution ◽  
Substitution Rate ◽  
High Vacuum ◽  
High Energy ◽  
Ultra High Vacuum ◽  
Visible Range ◽  
Doped Semiconductors ◽  
Potential Applications ◽  
Er Doped

ABSTRACTCa1−xErxF2+x thin films, with a substitution rate, x, varying from 1 to 20%, were deposited on Si(100) substrates by sublimation of high purity solid solution powders under ultra-high-vacuum. Rutherford backscattering studies have shown that the films have the composition of the initial solid solution powders, are quite homogeneous and are epitaxially grown on the substrates.The optical properties of these films were studied by means of cathodoluminescence and photoluminescence. At room temperature, the emissions due to the de-excitations from the 4S3/2, 4F9/2, 4I11/2 and 4I13/2 excited levels to the 4I15/2 ground state of Er 3+ (4f11) ions are easily detected (λ = 0.548, 0.66, 0.98 and 1.53 µm)The strong 1.53 µm infrared luminescence, which presents evident potential applications for optical communications, is maximum for an erbium substitution rate included between 15 and 17%. These Er concentrations are three or four orders of magnitude greater than the optimum ones in the case of Er-doped semiconductors, which are close to 1018 cm−3.In the visible range, the luminescences are also important.They allow us to detect high energy ion or electron beams. However their maximum efficiencies were observed for a relatively low erbium concentration, close to 1%. These different behaviours are explained by the cross relaxation phenomena, which depopulate the higher levels to the benefit of the 4I13/2→ 4I15/2 transition. The energy distribution of the Stark sublevels of the 4I15/2 state, which results from crystal field splitting, was deduced from a photoluminescence study at 2K. The obtained results show that the environment of the luminescent centres does not change with the erbium concentration.At last, it must be noted that the refractive index of the layers increases with the erbium concentration, leading to the realization of optical guides. Consequently opto-electronic components could be developed from such erbium doped heterostructures.

Semiconductor Thin Films Combined With Metallic Grating for Selective Improvement of Thermal Radiative Absorption/Emission

2009 ◽  
Vol 131 (3) ◽  
Author(s):  
C. J. Fu ◽  
W. C. Tan
Keyword(s):  
Thin Films ◽  
High Energy ◽  
Semiconductor Layer ◽  
Metallic Grating ◽  
Rigorous Coupled Wave Analysis ◽  
Semiconductor Thin Films ◽  
Wide Range ◽  
Potential Applications ◽  
Rigorous Coupled Wave ◽  
Energy Conversion Devices

We propose in this work a structure of semiconductor thin films combined with a one-dimensional metallic grating, which allows for selective improvement of thermal radiative absorptivity (also emissivity) of the structure. Both shallow and deep gratings are considered in this work. Our numerical results obtained with a 2D rigorous coupled-wave analysis algorithm demonstrate that the proposed structure exhibits enhanced spectral absorptivity for photon energy slightly above the gap energy of the semiconductor (silicon in this work). Furthermore, the selectively improved absorptivity can be obtained in a wide range of incidence angles. As such, much smaller thickness of the semiconductor layer is required to absorb the same amount of high energy photons than in a conventional Si-based photovoltaic device. In addition, absorptivity for low energy photons in the new structure is lower due to the smaller semiconductor layer thickness. Therefore, the new structure may have potential applications in energy conversion devices.

Direct STEM ADF imaging of gold on silicon (111)

1989 ◽  
Vol 47 ◽  
pp. 472-473
Author(s):  
P. Xu ◽  
E. J. Kirkland ◽  
J. Silcox
Keyword(s):  
Film Growth ◽  
Heavy Atom ◽  
High Vacuum ◽  
Dark Field ◽  
Thin Metal Film ◽  
Base Pressure ◽  
Ultra High Vacuum ◽  
Specimen Preparation ◽  
Dark Field Imaging ◽  
Wide Range

Many studies of thin metal film growth and the formation of metal-semiconductor contacts have been performed using a wide range of experimental methods. STEM annular dark field imaging could be an important complement since it may allow direct imaging of a single heavy atom on a thin silicon substrate. This would enable studies of the local atomic arrangements and defects in the initial stage of metal silicide formation.Preliminary experiments were performed in an ultra-high vacuum VG HB501A STEM with a base pressure of 1 × 10-10 mbar. An antechamber directly attached to the microscope for specimen preparation has a base pressure of 2×l0-10 mbar. A thin single crystal membrane was fabricated by anodic etching and subsequent reactive etching. The specimen was cleaned by the Shiraki method and had a very thin oxide layer left on the surface. 5 Å of gold was deposited on the specimen at room temperature from a tungsten filament coil monitored by a quartz crystal monitor.

Transmission Electron Microscopy of Epitaxial silicides grown by ultra high vacuum deposition

1989 ◽  
Vol 47 ◽  
pp. 462-463
Author(s):  
D. Loretto ◽  
J. M. Gibson ◽  
S. M. Yalisove
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Electron Diffraction ◽  
High Vacuum ◽  
High Energy ◽  
Energy Electron ◽  
Ultra High Vacuum ◽  
Ex Situ ◽  
Transmission Electron

The silicides CoSi2 and NiSi2 are both metallic with the fee flourite structure and lattice constants which are close to silicon (1.2% and 0.6% smaller at room temperature respectively) Consequently epitaxial cobalt and nickel disilicide can be grown on silicon. If these layers are formed by ultra high vacuum (UHV) deposition (also known as molecular beam epitaxy or MBE) their thickness can be controlled to within a few monolayers. Such ultrathin metal/silicon systems have many potential applications: for example electronic devices based on ballistic transport. They also provide a model system to study the properties of heterointerfaces. In this work we will discuss results obtained using in situ and ex situ transmission electron microscopy (TEM).In situ TEM is suited to the study of MBE growth for several reasons. It offers high spatial resolution and the ability to penetrate many monolayers of material. This is in contrast to the techniques which are usually employed for in situ measurements in MBE, for example low energy electron diffraction (LEED) and reflection high energy electron diffraction (RHEED), which are both sensitive to only a few monolayers at the surface.

TEM sample preparation of wear-tested room-temperature pulsed-laser-deposited thin films of MoS2 by ultramicrotomy

1993 ◽  
Vol 51 ◽  
pp. 1118-1119
Author(s):  
Pamela F. Lloyd ◽  
Scott D. Walck
Keyword(s):  
Thin Films ◽  
Sample Preparation ◽  
Room Temperature ◽  
High Vacuum ◽  
Pulsed Laser ◽  
Ultra High Vacuum ◽  
Wear Testing ◽  
Preparation Technique ◽  
Cross Sectional ◽  
Aerospace Applications

Pulsed laser deposition (PLD) is a novel technique for the deposition of tribological thin films. MoS2 is the archetypical solid lubricant material for aerospace applications. It provides a low coefficient of friction from cryogenic temperatures to about 350°C and can be used in ultra high vacuum environments. The TEM is ideally suited for studying the microstructural and tribo-chemical changes that occur during wear. The normal cross sectional TEM sample preparation method does not work well because the material’s lubricity causes the sandwich to separate. Walck et al. deposited MoS2 through a mesh mask which gave suitable results for as-deposited films, but the discontinuous nature of the film is unsuitable for wear-testing. To investigate wear-tested, room temperature (RT) PLD MoS2 films, the sample preparation technique of Heuer and Howitt was adapted.Two 300 run thick films were deposited on single crystal NaCl substrates. One was wear-tested on a ball-on-disk tribometer using a 30 gm load at 150 rpm for one minute, and subsequently coated with a heavy layer of evaporated gold.

scholarly journals Strain-Relief Patterns and Kagome Lattice in Self-Assembled C60 Thin Films Grown on Cd(0001)

2021 ◽  
Vol 22 (13) ◽  
pp. 6880
Author(s):  
Zilong Wang ◽  
Minlong Tao ◽  
Daxiao Yang ◽  
Zuo Li ◽  
Mingxia Shi ◽  
...  
Keyword(s):  
Thin Films ◽  
Self Assembly ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
Scanning Tunneling ◽  
Kagome Lattice ◽  
Tunneling Microscopy ◽  
Kagomé Lattice ◽  
Temperature Scanning ◽  
C60 Films

We report an ultra-high vacuum low-temperature scanning tunneling microscopy (STM) study of the C60 monolayer grown on Cd(0001). Individual C60 molecules adsorbed on Cd(0001) may exhibit a bright or dim contrast in STM images. When deposited at low temperatures close to 100 K, C60 thin films present a curved structure to release strain due to dominant molecule–substrate interactions. Moreover, edge dislocation appears when two different wavy structures encounter each other, which has seldomly been observed in molecular self-assembly. When growth temperature rose, we found two forms of symmetric kagome lattice superstructures, 2 × 2 and 4 × 4, at room temperature (RT) and 310 K, respectively. The results provide new insight into the growth behavior of C60 films.

Sign in / Sign up

Export Citation Format

Share Document