scholarly journals 5.4.1 Potentials of Capacitive Micromachined Ultrasonic Transducers (CMUT) and Film Bulk Acoustic Wave Resonators (FBAR) for Gas Sensing -an Industrial Point of View

2012 ◽  
Author(s):  
R. Pohle
Keyword(s):  
Acoustic Wave ◽  
Gas Sensing ◽  
Point Of View ◽  
Ultrasonic Transducers ◽  
Bulk Acoustic Wave ◽  
Capacitive Micromachined Ultrasonic Transducers ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

scholarly journals Selective normal mode excitation in multilayer thin film bulk acoustic wave resonators

2014 ◽  
Vol 105 (16) ◽  
pp. 162910 ◽  
Author(s):  
Andrey Kozyrev ◽  
Anatoly Mikhailov ◽  
Sergey Ptashnik ◽  
Peter K. Petrov ◽  
Neil Alford
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Normal Mode ◽  
Bulk Acoustic Wave ◽  
Multilayer Thin Film ◽  
Mode Excitation ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

Chemically Sensitized Thin-Film Bulk Acoustic Wave Resonators as Humidity Sensors

2010 ◽  
Vol 157 (12) ◽  
pp. J419 ◽  
Author(s):  
G. M. Ashley ◽  
P. B. Kirby ◽  
T. P. Butler ◽  
R. Whatmore ◽  
J. K. Luo
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Humidity Sensors ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators
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