P2K-2 Sensitivity Considerations in Localized Mass Detection Based on Thin-Film Bulk Acoustic Wave Resonators

2006 ◽  
Author(s):  
H. Campanella ◽  
J. Esteve ◽  
J. Montserrat ◽  
A. Romano-Rodriguez ◽  
A. Uranga ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Mass Detection ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

Localized-mass detection based on thin-film bulk acoustic wave resonators (FBAR): Area and mass location aspects

2008 ◽  
Vol 142 (1) ◽  
pp. 322-328 ◽  
Author(s):  
Humberto Campanella ◽  
Arantxa Uranga ◽  
Albert Romano-Rodríguez ◽  
Josep Montserrat ◽  
Gabriel Abadal ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Mass Detection ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

scholarly journals Selective normal mode excitation in multilayer thin film bulk acoustic wave resonators

2014 ◽  
Vol 105 (16) ◽  
pp. 162910 ◽  
Author(s):  
Andrey Kozyrev ◽  
Anatoly Mikhailov ◽  
Sergey Ptashnik ◽  
Peter K. Petrov ◽  
Neil Alford
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Normal Mode ◽  
Bulk Acoustic Wave ◽  
Multilayer Thin Film ◽  
Mode Excitation ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

Chemically Sensitized Thin-Film Bulk Acoustic Wave Resonators as Humidity Sensors

2010 ◽  
Vol 157 (12) ◽  
pp. J419 ◽  
Author(s):  
G. M. Ashley ◽  
P. B. Kirby ◽  
T. P. Butler ◽  
R. Whatmore ◽  
J. K. Luo
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Humidity Sensors ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators
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