High-Q AlN/SiO2 symmetric composite thin film bulk acoustic wave resonators

2008 ◽  
Vol 55 (11) ◽  
pp. 2463-2468 ◽  
Author(s):  
A. Artieda ◽  
P. Muralt
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Composite Thin Film ◽  
Bulk Acoustic Wave ◽  
High Q ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

scholarly journals Selective normal mode excitation in multilayer thin film bulk acoustic wave resonators

2014 ◽  
Vol 105 (16) ◽  
pp. 162910 ◽  
Author(s):  
Andrey Kozyrev ◽  
Anatoly Mikhailov ◽  
Sergey Ptashnik ◽  
Peter K. Petrov ◽  
Neil Alford
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Normal Mode ◽  
Bulk Acoustic Wave ◽  
Multilayer Thin Film ◽  
Mode Excitation ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators

Chemically Sensitized Thin-Film Bulk Acoustic Wave Resonators as Humidity Sensors

2010 ◽  
Vol 157 (12) ◽  
pp. J419 ◽  
Author(s):  
G. M. Ashley ◽  
P. B. Kirby ◽  
T. P. Butler ◽  
R. Whatmore ◽  
J. K. Luo
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Bulk Acoustic Wave ◽  
Humidity Sensors ◽  
Film Bulk ◽  
Acoustic Wave Resonators ◽  
Bulk Acoustic Wave Resonators
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