scholarly journals Room Temperature Preparation of Poly-Si Thin Films by IBE with Substrate Bias Method

2005 ◽  
Vol 6 (2) ◽  
pp. 57-62
Author(s):  
Byung-Yoon Cho ◽  
Sung-Chae Yang ◽  
Byoung-Sung Han ◽  
Jung-Hui Lee ◽  
Kiyoshi Yatsui
2003 ◽  
Vol 93 (10) ◽  
pp. 7945-7947 ◽  
Author(s):  
S. Kämmerer ◽  
S. Heitmann ◽  
D. Meyners ◽  
D. Sudfeld ◽  
A. Thomas ◽  
...  

2011 ◽  
Vol 12 (6) ◽  
pp. 1073-1079 ◽  
Author(s):  
Chung-Han Wu ◽  
Hanying Li ◽  
Hon Hang Fong ◽  
Vladimir A. Pozdin ◽  
Lara A. Estroff ◽  
...  

2017 ◽  
Vol 38 (2) ◽  
pp. 147-153
Author(s):  
高一骁 GAO Yi-xiao ◽  
蒋永乐 JIANG Yong-le ◽  
毕 剑 BI Jian ◽  
赖 欣 LAI Xin ◽  
高道江 GAO Dao-jiang

2013 ◽  
Vol 273 ◽  
pp. 491-495 ◽  
Author(s):  
Guang-Xing Liang ◽  
Ping Fan ◽  
Zhuang-Hao Zheng ◽  
Jing-Ting Luo ◽  
Dong-Ping Zhang ◽  
...  

Author(s):  
R. C. Moretz ◽  
G. G. Hausner ◽  
D. F. Parsons

Use of the electron microscope to examine wet objects is possible due to the small mass thickness of the equilibrium pressure of water vapor at room temperature. Previous attempts to examine hydrated biological objects and water itself used a chamber consisting of two small apertures sealed by two thin films. Extensive work in our laboratory showed that such films have an 80% failure rate when wet. Using the principle of differential pumping of the microscope column, we can use open apertures in place of thin film windows.Fig. 1 shows the modified Siemens la specimen chamber with the connections to the water supply and the auxiliary pumping station. A mechanical pump is connected to the vapor supply via a 100μ aperture to maintain steady-state conditions.


Author(s):  
R. M. Anderson ◽  
T. M. Reith ◽  
M. J. Sullivan ◽  
E. K. Brandis

Thin films of aluminum or aluminum-silicon can be used in conjunction with thin films of chromium in integrated electronic circuits. For some applications, these films exhibit undesirable reactions; in particular, intermetallic formation below 500 C must be inhibited or prevented. The Al films, being the principal current carriers in interconnective metal applications, are usually much thicker than the Cr; so one might expect Al-rich intermetallics to form when the processing temperature goes out of control. Unfortunately, the JCPDS and the literature do not contain enough data on the Al-rich phases CrAl7 and Cr2Al11, and the determination of these data was a secondary aim of this work.To define a matrix of Cr-Al diffusion couples, Cr-Al films were deposited with two sets of variables: Al or Al-Si, and broken vacuum or single pumpdown. All films were deposited on 2-1/4-inch thermally oxidized Si substrates. A 500-Å layer of Cr was deposited at 120 Å/min on substrates at room temperature, in a vacuum system that had been pumped to 2 x 10-6 Torr. Then, with or without vacuum break, a 1000-Å layer of Al or Al-Si was deposited at 35 Å/s, with the substrates still at room temperature.


Author(s):  
L. Tang ◽  
G. Thomas ◽  
M. R. Khan ◽  
S. L. Duan

Cr thin films are often used as underlayers for Co alloy magnetic thin films, such as Co1, CoNi2, and CoNiCr3, for high density longitudinal magnetic recording. It is belived that the role of the Cr underlayer is to control the growth and texture of the Co alloy magnetic thin films, and, then, to increase the in plane coercivity of the films. Although many epitaxial relationship between the Cr underlayer and the magnetic films, such as ﹛1010﹜Co/ {110﹜Cr4, ﹛2110﹜Co/ ﹛001﹜Cr5, ﹛0002﹜Co/﹛110﹜Cr6, have been suggested and appear to be related to the Cr thickness, the texture of the Cr underlayer itself is still not understood very well. In this study, the texture of a 2000 Å thick Cr underlayer on Nip/Al substrate for thin films of (Co75Ni25)1-xTix dc-sputtered with - 200 V substrate bias is investigated by electron microscopy.


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