scholarly journals Preparation of Crystallized Carbon Nitride Based on Microwave Plasma CVD-Effect of Carbon Source and H2 Addition to Gas System on Film Properties-

2010 ◽  
Vol 61 (7) ◽  
pp. 528-534 ◽  
Author(s):  
Masatoshi INOUE ◽  
Yukihiro SAKAMOTO ◽  
Matsufumi TAKAYA
Keyword(s):  
Carbon Source ◽  
Carbon Nitride ◽  
Microwave Plasma ◽  
Plasma Cvd ◽  
Film Properties ◽  
Microwave Plasma Cvd ◽  
Gas System ◽  
H2 Addition

Growth of carbon nitride using microwave plasma CVD

2005 ◽  
Vol 475 (1-2) ◽  
pp. 198-201 ◽  
Author(s):  
Yukihiro Sakamoto ◽  
Matsufumi Takaya
Keyword(s):  
Carbon Nitride ◽  
Microwave Plasma ◽  
Plasma Cvd ◽  
Microwave Plasma Cvd

Diamond Chemical Vapor Deposition: Gas Compositions and film Properties

1994 ◽  
Vol 339 ◽  
Author(s):  
Peter K. Bachmann ◽  
Hans-Jürgen Hagemann ◽  
Hartmut Lade ◽  
Dieter Leers ◽  
Frederike Picht ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Chemical Vapor ◽  
Plasma Cvd ◽  
Film Properties ◽  
Heat Spreader ◽  
Deposition Parameters ◽  
Microwave Plasma Cvd ◽  
Vacuum Window ◽  
Diamond Chemical Vapor Deposition ◽  
Deposition Technology

ABSTRACTRate, crystallinity and phase purity of vapor-grown diamond deposits are discussed. Emphasis is on microwave plasma CVD of diamond from C/H-, C/H/O-, C/H/F-, C/H/CI- and C/H/N-gas mixtures.The manufacture of wear-resistant diamond thin films, diamond vacuum window membranes and thick diamond heat spreader plates are used as examples to outline the influence of various deposition parameters on the performance of finished products and to describe the use of ternary gas phase compositional diagrams as tools for minimization of deposition technology and product optimization efforts.

scholarly journals Large area microwave plasma CVD of diamond using composite right/left-handed materials

2021 ◽  
Vol 116 ◽  
pp. 108394
Author(s):  
Justas Zalieckas ◽  
Paulius Pobedinskas ◽  
Martin Møller Greve ◽  
Kristoffer Eikehaug ◽  
Ken Haenen ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Plasma Cvd ◽  
Large Area ◽  
Left Handed ◽  
Microwave Plasma Cvd

Deposition of large area uniform diamond films by microwave plasma CVD

Vacuum ◽  
2018 ◽  
Vol 147 ◽  
pp. 134-142 ◽  
Author(s):  
J. Weng ◽  
F. Liu ◽  
L.W. Xiong ◽  
J.H. Wang ◽  
Q. Sun
Keyword(s):  
Microwave Plasma ◽  
Diamond Films ◽  
Plasma Cvd ◽  
Large Area ◽  
Microwave Plasma Cvd
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