Highly Reliable Cu Wiring Layer of 1/1 μm Line/Space Using Newly Designed Insulation Barrier Film

2017 ◽  
Vol 2017 (1) ◽  
pp. 000140-000145 ◽  
Author(s):  
Kazuyuki Mitsukura ◽  
Shinichiro Abe ◽  
Masaya Toba ◽  
Tomonori Minegishi ◽  
Kazuhiko Kurafuchi
Keyword(s):  
Low Cost ◽  
Stress Test ◽  
Chloride Ion ◽  
Moisture Sensitivity ◽  
Sensitivity Level ◽  
Accelerated Stress Test ◽  
Good Adhesive ◽  
Line Space ◽  
Level 2 ◽  
Barrier Film

Abstract The interposer or fan-out packaging technology with ultra-fine line/space has been required in order to achieve high density interconnection between chips with low cost. In this paper, we propose the iBF (insulation barrier film) to satisfy the insulation reliability of 1/1 μm ultra-fine trench wiring. The features of iBF are very low moisture absorptivity less than 0.3%, chloride ion impurities less than 1.0 ppm and high resistance to hydrolysis. In addition, iBF has good adhesive strength to Ti and Cu. The trench wiring was fabricated for mechanical and insulation reliability evaluation using photosensitive dielectric, then covered with iBF. The obtained trench wiring with 2/2, 1.5/1.5 and 1/1 μm line/space has passed the reliability tests such as moisture sensitivity level 2, thermal cycling test and biased HAST (highly accelerated stress test). We have also verified high resolution of photosensitive dielectric and fabrication of ultra-fine trench wiring on iBF to realize fine multi-layer wiring.

Proposal of Ultrafine and High Reliable Trench Wiring Process for Organic Interposer

2017 ◽  
Vol 14 (1) ◽  
pp. 26-31 ◽  
Author(s):  
Kazuyuki Mitsukura ◽  
Masaya Toba ◽  
Kousuke Urashima ◽  
Yoshinori Ejiri ◽  
Kenichi Iwashita ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Seed Layer ◽  
High Reliability ◽  
Metal Layer ◽  
Stress Test ◽  
Side Wall ◽  
Moisture Sensitivity ◽  
Sintered Copper ◽  
Fine Resolution ◽  
Level 2

An organic interposer technology with ultrafine line and space is required to achieve high-density interconnection between chips. In this article, we propose a high reliability, ultrafine trench wiring process. Currently, trench wiring is made by laser ablation of dielectric, sputtering, copper plating, and then chemical mechanical polishing (CMP). However, it is challenging to achieve fine trench with smooth side wall using laser ablation, and CMP is also not suitable because of its high assembly cost. Reliability is another challenge because of the narrower and thinner insulator. We have developed a photosensitive insulation film (PIF) with fine resolution. The trench wiring of 2/2 μm line and space has been successfully assembled by photolithography, plating, and surface planer method as the alternative to CMP. The wiring layer of 2/2 μm line and space, which is covered with a thin barrier metal layer and PIF, has passed the biased highly accelerated temperature and humidity stress test (HAST) screening. A copper paste is applied as a seed layer instead of sputtering. The sintered copper filled with adhesive paste into the copper pores is compatible as the seed layer, and the wiring layer of 10/10 μm line and space has passed the reliability tests such as moisture sensitivity level 2 (MSL2), thermal cycling test, and biased HAST.

scholarly journals Boosting efficiency and stability using zirconia nanosphere-held carbon for proton exchange membrane fuel cells

RSC Advances ◽  
2018 ◽  
Vol 8 (1) ◽  
pp. 472-480 ◽  
Author(s):  
P. Dhanasekaran ◽  
Sharon R. Williams ◽  
D. Kalpana ◽  
Santoshkumar D. Bhat
Keyword(s):  
Fuel Cells ◽  
Proton Exchange Membrane ◽  
Stress Test ◽  
Pt Nanoparticles ◽  
Proton Exchange ◽  
Carbon Corrosion ◽  
Accelerated Stress Test ◽  
Exchange Membrane

Corrosion during the accelerated stress test for Pt on carbon and Pt on Zr–C 3 composite representing the steps for reduced carbon corrosion, stabilized Pt nanoparticles and re-deposition of Pt nanoparticles on the ZrO2:C composite.

scholarly journals Developing Accelerated Stress Test Protocols for Solid Oxide Fuel Cells and Electrolysers: The European Project AD ASTRA

2019 ◽  
Vol 91 (1) ◽  
pp. 563-570 ◽  
Author(s):  
Stephen J. McPhail ◽  
Davide Pumiglia ◽  
Jérôme Laurencin ◽  
Anke Hagen ◽  
Aline Leon ◽  
...  
Keyword(s):  
Fuel Cells ◽  
Solid Oxide Fuel Cells ◽  
Stress Test ◽  
Solid Oxide ◽  
Oxide Fuel ◽  
European Project ◽  
Accelerated Stress Test

Test Level 2 Guardrail-to-Bridge Rail Transition Compatible with 31-in. Guardrail

2013 ◽  
Vol 2377 (1) ◽  
pp. 74-83
Author(s):  
R. P. Bligh ◽  
D. R. Arrington ◽  
R. Meza
Keyword(s):  
High Speed ◽  
Low Cost ◽  
Transition Systems ◽  
Speed Test ◽  
Traffic Conditions ◽  
Level 3 ◽  
Common Application ◽  
Departments Of Transportation ◽  
Test Level ◽  
Level 2

Many state departments of transportation are in the process of updating their guardrail standards to comply with the AASHTO Manual for Assessing Safety Hardware (MASH) and guidance issued by FHWA on guardrail height. A key feature of the new systems is an increase in rail mounting height from 27 in. to 31 in. A common application of guardrails is shielding motorists from hazards at bridge approaches, including the end of the bridge rail. When a flexible-approach guardrail is attached to a rigid bridge rail, a transition section is needed to transition the stiffness properly from one system to another. A nested thrie beam transition system has been successfully tested to MASH guidelines and is compatible with a 31-in.-approach guardrail. However, it is cost-prohibitive to use this high-speed, Test Level 3 transition on all roadways. A low-cost transition was successfully evaluated under NCHRP Report 350 Test Level 2 (TL-2) impact conditions for use on lower-speed roadways. However, this TL-2 W-beam transition is 27 in. tall and is not compatible with the new 31-in. guardrail systems. This paper describes a new low-cost guardrail-to-bridge rail transition that was successfully developed and tested under MASH TL-2 conditions. The transition is compatible with new 31-in. guardrails and can connect to rigid concrete bridge rails. The transition is considered suitable for implementation on roadways that have traffic conditions appropriate for the use of TL-2 safety hardware. Use of this system would provide significant savings in both material and installation costs compared with high-speed transition systems.

scholarly journals Low Cost Magnetic Resonance Imaging-Compatible Stepper Exercise Device for Use in Cardiac Stress Tests

2014 ◽  
Vol 8 (4) ◽  
Author(s):  
Omid Forouzan ◽  
Evan Flink ◽  
Jared Warczytowa ◽  
Nick Thate ◽  
Andrew Hanske ◽  
...  
Keyword(s):  
Magnetic Resonance Imaging ◽  
Magnetic Resonance ◽  
Low Cost ◽  
Stress Test ◽  
Exercise Stress ◽  
Resonance Imaging ◽  
Pharmacological Stress ◽  
Cardiac Stress ◽  
Adjustable Weight ◽  
Cardiac Stress Test

Cardiovascular disease is the leading cause of death worldwide. Many cardiovascular diseases are better diagnosed during a cardiac stress test. Current approaches include either exercise or pharmacological stress echocardiography and pharmacological stress magnetic resonance imaging (MRI). MRI is the most accurate noninvasive method of assessing cardiac function. Currently there are very few exercise devices that allow collection of cardiovascular MRI data during exercise. We developed a low-cost exercise device that utilizes adjustable weight resistance and is compatible with magnetic resonance (MR) imaging. It is equipped with electronics that measure power output. Our device allows subjects to exercise with a leg-stepping motion while their torso is in the MR imager. The device is easy to mount on the MRI table and can be adjusted for different body sizes. Pilot tests were conducted with 5 healthy subjects (3 male and 2 female, 29.2 ± 3.9 yr old) showing significant exercise-induced changes in heart rate (+42%), cardiac output (+40%) and mean pulmonary artery (PA) flow (+%49) post exercise. These data demonstrate that our MR compatible stepper exercise device successfully generated a hemodynamically stressed state while allowing for high quality imaging. The adjustable weight resistance allows exercise stress testing of subjects with variable exercise capacities. This low-cost device has the potential to be used in a variety of pathologies that require a cardiac stress test for diagnosis and assessment of disease progression.

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