scholarly journals Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

10.3791/55649 ◽  
2017 ◽  
Author(s):  
Bidhan Pramanick ◽  
Sergio O. Martinez-Chapa ◽  
Marc Madou ◽  
Hyundoo Hwang
Keyword(s):  
Microelectromechanical Systems ◽  
Carbon Microelectromechanical Systems

Carbon microelectromechanical systems as a substratum for cell growth

2008 ◽  
Vol 3 (3) ◽  
pp. 034116 ◽  
Author(s):  
G Turon Teixidor ◽  
R A Gorkin ◽  
P P Tripathi ◽  
G S Bisht ◽  
M Kulkarni ◽  
...  
Keyword(s):  
Cell Growth ◽  
Microelectromechanical Systems ◽  
Carbon Microelectromechanical Systems

C-MEMS/NEMS: A Novel Technology for Nanoscale Material Formation From Graphite Fiber to Ni and Si Nanowires

2004 ◽  
Author(s):  
Chunlei Wang ◽  
Rabih Zaouk ◽  
Kartikeya Malladi ◽  
Lili Taherabadi ◽  
Marc Madou
Keyword(s):  
Focused Ion Beam ◽  
Microelectromechanical Systems ◽  
Ion Beam ◽  
Dna Arrays ◽  
Si Nanowires ◽  
Sem Image ◽  
Carbon Structures ◽  
Potential Applications ◽  
The Many ◽  
Carbon Microelectromechanical Systems

Carbon microelectromechanical systems (C-MEMS) and carbon nanoelectromechanical system (C-NEMS) have received much attention because of the many potential applications. Some important applications include: DNA arrays, glucose sensors, microbatteries and biofuel cells. Microfabrication of carbon structures using current processing technology, including focused ion beam (FIB)1 and reactive ion etching (RIE)2, is time consuming and expensive. Low feature resolution, and poor repeatability of the carbon composition as well as widely varying properties of the resulting devices limits the use of screen printing of commercial carbon inks for C-MEMS. Our newly developed C-MEMS microfabrication technique is based on the pyrolysis of photo patterned resists34. Figure 1(a) shows a typical SEM image of C-MEMS/NEMS features with carbon posts connected by carbon fibers. Figure 1(b) shows a typical carbon post with carbon nanofibers on its side surfaces.

scholarly journals Development of a Novel Gas-Sensing Platform Based on a Network of Metal Oxide Nanowire Junctions Formed on a Suspended Carbon Nanomesh Backbone

Sensors ◽  
2021 ◽  
Vol 21 (13) ◽  
pp. 4525
Author(s):  
Taejung Kim ◽  
Seungwook Lee ◽  
Wootaek Cho ◽  
Yeong Min Kwon ◽  
Jeong Min Baik ◽  
...  
Keyword(s):  
Metal Oxide ◽  
Gas Sensors ◽  
Microelectromechanical Systems ◽  
Gas Sensing ◽  
Limit Of Detection ◽  
Cost Effective ◽  
Sensing Platform ◽  
Batch Fabrication ◽  
Sensor Platform ◽  
Carbon Microelectromechanical Systems

Junction networks made of longitudinally connected metal oxide nanowires (MOx NWs) have been widely utilized in resistive-type gas sensors because the potential barrier at the NW junctions leads to improved gas sensing performances. However, conventional MOx–NW-based gas sensors exhibit limited gas access to the sensing sites and reduced utilization of the entire NW surfaces because the NW networks are grown on the substrate. This study presents a novel gas sensor platform facilitating the formation of ZnO NW junction networks in a suspended architecture by growing ZnO NWs radially on a suspended carbon mesh backbone consisting of sub-micrometer-sized wires. NW networks were densely formed in the lateral and longitudinal directions of the ZnO NWs, forming additional longitudinally connected junctions in the voids of the carbon mesh. Therefore, target gases could efficiently access the sensing sites, including the junctions and the entire surface of the ZnO NWs. Thus, the present sensor, based on a suspended network of longitudinally connected NW junctions, exhibited enhanced gas response, sensitivity, and lower limit of detection compared to sensors consisting of only laterally connected NWs. In addition, complete sensor structures consisting of a suspended carbon mesh backbone and ZnO NWs could be prepared using only batch fabrication processes such as carbon microelectromechanical systems and hydrothermal synthesis, allowing cost-effective sensor fabrication.

Charge Trapping and Degradation Properties of PZT Thin Films for MEMS

1996 ◽  
Vol 444 ◽  
Author(s):  
Hyeon-Seag Kim ◽  
D. L. Polla ◽  
S. A. Campbell
Keyword(s):  
Thin Films ◽  
Loss Factor ◽  
High Field ◽  
Microelectromechanical Systems ◽  
Charge Trapping ◽  
Metal Organic ◽  
Electrical Reliability ◽  
Silicon Based ◽  
Degradation Properties ◽  
Organic Decomposition

AbstractThe electrical reliability properties of PZT (54/46) thin films have been measured for the purpose of integrating this material with silicon-based microelectromechanical systems. Ferroelectric thin films of PZT were prepared by metal organic decomposition. The charge trapping and degradation properties of these thin films were studied through device characteristics such as hysteresis loop, leakage current, fatigue, dielectric constant, capacitancevoltage, and loss factor measurements. Several unique experimental results have been found. Different degradation processes were verified through fatigue (bipolar stress), low and high charge injection (unipolar stress), and high field stressing (unipolar stress).

Development perspective microelectromechanical systems (MEMS)by methods of semi-real simulation

2006 ◽  
Vol 4 ◽  
pp. 288-305
Author(s):  
A.B. Migranov
Keyword(s):  
Virtual Environment ◽  
Microelectromechanical Systems ◽  
Testing And Debugging ◽  
Development Perspective

The article deals with the issues related to the construction of microelectromechanical systems (MEMS), and the problems arising from their manufacture. Particular attention is paid to micromechanical parts of robot, which were developed by methods of semi-simulation using the virtual environment for designing, testing and debugging MEMS.

Embedded Microelectromechanical Systems (MEMS) for Measuring Strain in Composites

2000 ◽  
Vol 19 (4) ◽  
pp. 268-277 ◽  
Author(s):  
CHARLES HAUTAMAKI ◽  
SHAYNE ZURN ◽  
SUSAN C. MANTELL ◽  
DENNIS L. POLLA
Keyword(s):  
Microelectromechanical Systems
Sign in / Sign up

Export Citation Format

Share Document