Interference-aided spectrum-fitting method for accurate film thickness determination

2016 ◽  
Vol 14 (8) ◽  
pp. 081203-81207 ◽  
Author(s):  
Xingxing Liu Xingxing Liu ◽  
Shaowei Wang Shaowei Wang ◽  
Hui Xia Hui Xia ◽  
Xutao Zhang Xutao Zhang ◽  
Ruonan Ji Ruonan Ji ◽  
...  
Author(s):  
C. Klatt ◽  
W. Ensinger ◽  
H. Martin ◽  
G.K. Wolf ◽  
P. Oberschachtsiek ◽  
...  

2007 ◽  
Vol 102 (11) ◽  
pp. 113108 ◽  
Author(s):  
Yingxin Wang ◽  
Ziran Zhao ◽  
Zhiqiang Chen ◽  
Kejun Kang ◽  
Bing Feng ◽  
...  

2013 ◽  
Vol 444-445 ◽  
pp. 1082-1086
Author(s):  
Xue Ni Wang ◽  
Jing Zhou

In order to get a simulated earthquake wave whose response spectrum fitted well to the smooth design response spectrum, a model was established by making the standard error between the response spectrum of simulated earthquake wave and the design response spectrum as the minimal optimization objective. Simulated annealing particle swarm optimization algorithm, which was an improvement algorithm of particle swarm optimization, was used to solve the model. This spectrum fitting method was compared with the conventional spectrum fitting method, which adjusted Fourier amplitude spectrum in frequency domain. The results show that the method of response spectrum fitting by applying simulated annealing particle swarm optimization algorithm has a good convergence. And the response spectrum of simulated earthquake wave generated by simulated annealing particle swarm optimization algorithm agrees better with the design response spectrum than that by conventional spectrum fitting method.


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