Interference-aided spectrum-fitting method for accurate film thickness determination
2016 ◽
Vol 14
(8)
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pp. 081203-81207
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1992 ◽
Vol 68
(1-4)
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pp. 277-280
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2017 ◽
Vol 173
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pp. 822-826
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2018 ◽
Vol 551
(1-2)
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pp. 203-211
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Keyword(s):
1968 ◽
Vol 115
(5)
◽
pp. 467
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2013 ◽
Vol 444-445
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pp. 1082-1086