A Film-Thickness Determination of Nitrogen Diffusion in Zirconium Nitride

1968 ◽  
Vol 115 (5) ◽  
pp. 467 ◽  
Author(s):  
C. J. Rosa ◽  
W. C. Hagel
Keyword(s):  
Film Thickness ◽  
Zirconium Nitride ◽  
Nitrogen Diffusion ◽  
Thickness Determination

Thickness determination of ultrathin oxide films and its application in magnetic tunnel junctions

2006 ◽  
Vol 35 (12) ◽  
pp. 2142-2146 ◽  
Author(s):  
J. Joshua Yang ◽  
Chengxiang Ji ◽  
Ying Yang ◽  
Y. Austin Chang ◽  
Feng X. Liu ◽  
...  
Keyword(s):  
Tunnel Junctions ◽  
Oxide Films ◽  
Magnetic Tunnel Junctions ◽  
Thickness Determination ◽  
Ultrathin Oxide Films ◽  
Ultrathin Oxide

Characterization and Control of Copper CMP with Optoacoustic Metrology

2001 ◽  
Vol 671 ◽  
Author(s):  
Michael Gostein ◽  
Paul Lefevre ◽  
Alex A. Maznev ◽  
Michael Joffe
Keyword(s):  
Film Thickness ◽  
Spatial Resolution ◽  
Chemical Mechanical Polishing ◽  
High Spatial Resolution ◽  
Mechanical Polishing ◽  
Length Measurement ◽  
And Control ◽  
Non Destructive

ABSTRACTWe discuss applications of optoacoustic film thickness metrology for characterization of copper chemical-mechanical polishing (CMP). We highlight areas where the use of optoacoustics for CMP characterization provides data complementary to that obtained by other techniques because of its ability to directly measure film thickness with high spatial resolution in a rapid, non-destructive manner. Examples considered include determination of planarization length, measurement of film thickness at intermediate stages of polish, and measurement of arrays of metal lines.

Thickness determination of thin and ultra-thin SiO2 films by C-AFM IV-spectroscopy

2006 ◽  
Vol 252 (6) ◽  
pp. 2375-2388 ◽  
Author(s):  
Werner Frammelsberger ◽  
Guenther Benstetter ◽  
Janice Kiely ◽  
Richard Stamp
Keyword(s):  
Sio2 Films ◽  
Thickness Determination

scholarly journals Standard Free Thickness Determination of Thin TEM Samples via Backscatter Electron Image Correlation

2009 ◽  
Vol 15 (S2) ◽  
pp. 340-341 ◽  
Author(s):  
R Salzer ◽  
A Graff ◽  
M Simon ◽  
F Altmann
Keyword(s):  
Image Correlation ◽  
Backscatter Electron Image ◽  
Backscatter Electron ◽  
Thickness Determination ◽  
Electron Image

Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Film thickness determination with PIXE

1992 ◽  
Vol 68 (1-4) ◽  
pp. 277-280 ◽  
Author(s):  
C. Klatt ◽  
W. Ensinger ◽  
H. Martin ◽  
G.K. Wolf ◽  
P. Oberschachtsiek ◽  
...  
Keyword(s):  
Film Thickness ◽  
Thickness Determination
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