Thermal Characterization of Dynamic Silicon Cantilever Array Sensors by Digital Holographic Microscopy
2011 ◽
Vol 82
(6)
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pp. 063903
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Keyword(s):
Keyword(s):
2015 ◽
Vol 14
(4)
◽
pp. 041314
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2007 ◽
Vol 16
(3)
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pp. 659-667
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