Digital holographic microscopy (DHM) for metrology and dynamic characterization of MEMS and MOEMS
2007 ◽
Vol 16
(3)
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pp. 659-667
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Keyword(s):
2015 ◽
Vol 14
(4)
◽
pp. 041314
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2021 ◽
Vol 7
(3)
◽
pp. 030306
Keyword(s):