High-throughput characterization of stresses in thin film materials libraries using Si cantilever array wafers and digital holographic microscopy
2011 ◽
Vol 82
(6)
◽
pp. 063903
◽
Keyword(s):
2011 ◽
Vol 12
(5)
◽
pp. 054201
◽
Keyword(s):
Keyword(s):
2006 ◽
Vol 252
(7)
◽
pp. 2615-2621
◽
Keyword(s):
2015 ◽
Vol 14
(4)
◽
pp. 041314
◽
Keyword(s):
2019 ◽
Keyword(s):