scholarly journals A Wafer Level Vacuum Encapsulated Capacitive Accelerometer Fabricated in an Unmodified Commercial MEMS Process

Sensors ◽  
2015 ◽  
Vol 15 (4) ◽  
pp. 7349-7359 ◽  
Author(s):  
Adel Merdassi ◽  
Peng Yang ◽  
Vamsy Chodavarapu
Keyword(s):  
Wafer Level ◽  
Capacitive Accelerometer ◽  
Mems Process

Implementation of a monolithic capacitive accelerometer in a wafer-level 0.18 µm CMOS MEMS process

2012 ◽  
Vol 22 (5) ◽  
pp. 055010 ◽  
Author(s):  
Sheng-Hsiang Tseng ◽  
Michael S-C Lu ◽  
Po-Chang Wu ◽  
Yu-Chen Teng ◽  
Hann-Huei Tsai ◽  
...  
Keyword(s):  
Wafer Level ◽  
Capacitive Accelerometer ◽  
Cmos Mems ◽  
Mems Process

Wafer-level vacuum-encapsulated rate gyroscope with high quality factor in a commercial MEMS process

2017 ◽  
Vol 23 (8) ◽  
pp. 3745-3756 ◽  
Author(s):  
Adel Merdassi ◽  
Mohamad Nizar Kezzo ◽  
Vamsy P. Chodavarapu
Keyword(s):  
Quality Factor ◽  
High Quality Factor ◽  
Wafer Level ◽  
High Quality ◽  
Mems Process

scholarly journals Sputtered Encapsulation as Wafer Level Packaging for Isolatable MEMS Devices: A Technique Demonstrated on a Capacitive Accelerometer

Sensors ◽  
2008 ◽  
Vol 8 (11) ◽  
pp. 7438-7452 ◽  
Author(s):  
Azrul Hamzah ◽  
Jumril Yunas ◽  
Burhanuddin Majlis ◽  
Ibrahim Ahmad
Keyword(s):  
Mems Devices ◽  
Wafer Level ◽  
Capacitive Accelerometer ◽  
Wafer Level Packaging

scholarly journals A Monolithic Three-Axis Accelerometer with Wafer-Level Package by CMOS MEMS Process

Proceedings ◽  
2017 ◽  
Vol 1 (4) ◽  
pp. 337 ◽  
Author(s):  
S. H. Tseng ◽  
C. Y. Yeh ◽  
A. Y. Chang ◽  
Y. J. Wang ◽  
P. C. Chen ◽  
...  
Keyword(s):  
Wafer Level ◽  
Cmos Mems ◽  
Wafer Level Package ◽  
Mems Process

Wafer level vacuum encapsulated tri-axial accelerometer with low cross-axis sensitivity in a commercial MEMS Process

2015 ◽  
Vol 236 ◽  
pp. 25-37 ◽  
Author(s):  
Adel Merdassi ◽  
Mohamed Nizar Kezzo ◽  
George Xereas ◽  
Vamsy P. Chodavarapu
Keyword(s):  
Wafer Level ◽  
Cross Axis ◽  
Mems Process
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