scholarly journals An Integrated Laser-Induced Piezoelectric/Differential Confocal Surface Acoustic Wave System for Measurement of Thin Film Young’s Modulus

Sensors ◽  
2012 ◽  
Vol 12 (9) ◽  
pp. 12208-12219 ◽  
Author(s):  
Fei Yang ◽  
Dante J. Dorantes-Gonzalez ◽  
Kun Chen ◽  
Zimo Lu ◽  
Baoyin Jin ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Young’S Modulus ◽  
Surface Acoustic Wave ◽  
Young's Modulus ◽  
Wave System

scholarly journals Young's modulus of plasma‐polymerized allylamine films using micromechanical cantilever sensor and laser‐based surface acoustic wave techniques

2018 ◽  
Vol 15 (9) ◽  
pp. 1800083 ◽  
Author(s):  
Masaya Toda ◽  
Koji Miyake ◽  
Li‐Qiang Chu ◽  
Marjan Zakerin ◽  
Renate Förch ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Young’S Modulus ◽  
Surface Acoustic Wave ◽  
Young's Modulus ◽  
Cantilever Sensor

Aluminum Nitride Thin Film Based Surface Acoustic Wave Sensors

2008 ◽  
Author(s):  
A. Kabulski ◽  
V. R. Pagán ◽  
D. Cortes ◽  
R. Burda ◽  
O. M. Mukdadi ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Aluminum Nitride ◽  
Surface Acoustic Wave ◽  
Acoustic Wave Sensors ◽  
Wave Sensors

scholarly journals Formation of a Complex Topologies of SAW-Based Inertial Sensors by Laser Thin Film Local Evaporation

Micromachines ◽  
2020 ◽  
Vol 12 (1) ◽  
pp. 10
Author(s):  
Alexander Kukaev ◽  
Dmitry Lukyanov ◽  
Denis Mikhailenko ◽  
Daniil Safronov ◽  
Sergey Shevchenko ◽  
...  
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
Acoustic Waves ◽  
Inertial Sensors ◽  
Surface Acoustic Waves ◽  
Sensing Element ◽  
Small Series ◽  
Evaporation Technique ◽  
Photolithography Process

Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.

Measurement of Young's Modulus and Poisson's Ratio of Thin Film by Combination of Bulge Test and Nano-Indentation

2008 ◽  
Vol 33-37 ◽  
pp. 969-974 ◽  
Author(s):  
Bong Bu Jung ◽  
Seong Hyun Ko ◽  
Hun Kee Lee ◽  
Hyun Chul Park
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Young’S Modulus ◽  
Poisson’S Ratio ◽  
Young's Modulus ◽  
Applied Pressure ◽  
Indentation Test ◽  
Poisson's Ratio ◽  
Bulge Test ◽  
Nano Indentation

This paper will discuss two different techniques to measure mechanical properties of thin film, bulge test and nano-indentation test. In the bulge test, uniform pressure applies to one side of thin film. Measurement of the membrane deflection as a function of the applied pressure allows one to determine the mechanical properties such as the elastic modulus and the residual stress. Nano-indentation measurements are accomplished by pushing the indenter tip into a sample and then withdrawing it, recording the force required as a function of position. . In this study, modified King’s model can be used to estimate the mechanical properties of the thin film in order to avoid the effect of substrates. Both techniques can be used to determine Young’s modulus or Poisson’s ratio, but in both cases knowledge of the other variables is needed. However, the mathematical relationship between the modulus and Poisson's ratio is different for the two experimental techniques. Hence, achieving agreement between the techniques means that the modulus and Poisson’s ratio and Young’s modulus of thin films can be determined with no a priori knowledge of either.

Longitudinal-Type Leaky Surface Acoustic Wave on LiNbO3with High-Velocity Thin Film

2013 ◽  
Vol 52 (7S) ◽  
pp. 07HD02 ◽  
Author(s):  
Fumiya Matsukura ◽  
Masato Uematsu ◽  
Keiko Hosaka ◽  
Shoji Kakio
Keyword(s):  
Thin Film ◽  
Acoustic Wave ◽  
Surface Acoustic Wave ◽  
High Velocity
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