Surface acoustic wave thin-film chemical microsensors based on covalently bound C60 derivatives: a molecular self-assembly approach

Langmuir ◽  
1993 ◽  
Vol 9 (12) ◽  
pp. 3341-3344 ◽  
Author(s):  
DeQuan Li ◽  
Basil I. Swanson
2008 ◽  
Author(s):  
A. Kabulski ◽  
V. R. Pagán ◽  
D. Cortes ◽  
R. Burda ◽  
O. M. Mukdadi ◽  
...  

Micromachines ◽  
2020 ◽  
Vol 12 (1) ◽  
pp. 10
Author(s):  
Alexander Kukaev ◽  
Dmitry Lukyanov ◽  
Denis Mikhailenko ◽  
Daniil Safronov ◽  
Sergey Shevchenko ◽  
...  

Originally, sensors based on surface acoustic waves are fabricated using photolithography, which becomes extremely expensive when a small series or even single elements are needed for the research. A laser thin film local evaporation technique is proposed to substitute the photolithography process in the production of surface acoustic wave based inertial sensors prototypes. To estimate its potential a prototype of a surface acoustic wave gyroscope sensing element was fabricated and tested. Its was shown that the frequency mismatch is no more than 1%, but dispersion of the wave on small inertial masses leads to a spurious parasitic signal on receiving electrodes. Possible ways of its neglecting is discussed.


2013 ◽  
Vol 52 (7S) ◽  
pp. 07HD02 ◽  
Author(s):  
Fumiya Matsukura ◽  
Masato Uematsu ◽  
Keiko Hosaka ◽  
Shoji Kakio

2004 ◽  
Vol 85 (10) ◽  
pp. 1757-1759 ◽  
Author(s):  
A. K. Sarin Kumar ◽  
P. Paruch ◽  
J.-M. Triscone ◽  
W. Daniau ◽  
S. Ballandras ◽  
...  

IEEE Access ◽  
2020 ◽  
Vol 8 ◽  
pp. 38347-38354 ◽  
Author(s):  
Yana Jia ◽  
Wen Wang ◽  
Yuan Sun ◽  
Mengwei Liu ◽  
Xufeng Xue ◽  
...  

Sensors ◽  
2015 ◽  
Vol 15 (8) ◽  
pp. 17916-17925 ◽  
Author(s):  
Yong Pan ◽  
Ning Mu ◽  
Shengyu Shao ◽  
Liu Yang ◽  
Wen Wang ◽  
...  

2019 ◽  
Vol 126 (7) ◽  
pp. 075106 ◽  
Author(s):  
Nicolas Kurz ◽  
Anli Ding ◽  
Daniel F. Urban ◽  
Yuan Lu ◽  
Lutz Kirste ◽  
...  

Author(s):  
Mohanraj Soundara Pandian ◽  
Eloi Marigo ◽  
Muniandy Shunmugam ◽  
Rubiyatulniza Binti Hussain ◽  
Charlie Tay Wee Song ◽  
...  

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