Estimation of Young's Modulus for Polysilicon Thin Film by Finite Element Analysis
2005 ◽
Vol 54
(10)
◽
pp. 1016-1021
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Keyword(s):
Keyword(s):
2006 ◽
Vol 326-328
◽
pp. 219-222
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2005 ◽
Vol 43
(2)
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pp. 258-264
◽
2006 ◽
Vol 321-323
◽
pp. 278-281
2014 ◽
Vol 64
◽
pp. 1-8
◽
Keyword(s):
Keyword(s):
2010 ◽
Vol 25
(6)
◽
pp. 1131-1136
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2007 ◽
Vol 2007.3
(0)
◽
pp. S79