scholarly journals Slurry Injection Schemes on the Extent of Slurry Mixing and Availability during Chemical Mechanical Planarization

Micromachines ◽  
2017 ◽  
Vol 8 (6) ◽  
pp. 170 ◽  
Author(s):  
Matthew Bahr ◽  
Yasa Sampurno ◽  
Ruochen Han ◽  
Ara Philipossian
Keyword(s):  
Chemical Mechanical Planarization ◽  
Slurry Injection

Analysis of A Novel Slurry Injection System in Chemical Mechanical Planarization

2011 ◽  
Vol 50 (5S1) ◽  
pp. 05EC01 ◽  
Author(s):  
Anand Meled ◽  
Yun Zhuang ◽  
Yasa Adi Sampurno ◽  
Siannie Theng ◽  
Yubo Jiao ◽  
...  
Keyword(s):  
Chemical Mechanical Planarization ◽  
Injection System ◽  
Slurry Injection

Application of a Slurry Injection System to Cobalt “Buff Step” Chemical Mechanical Planarization

2018 ◽  
Vol 7 (4) ◽  
pp. P170-P174 ◽  
Author(s):  
Calliandra Stuffle ◽  
Ruochen Han ◽  
Yasa Sampurno ◽  
Siannie Theng ◽  
Wei-Tsu Tseng ◽  
...  
Keyword(s):  
Chemical Mechanical Planarization ◽  
Injection System ◽  
Slurry Injection

Analysis of A Novel Slurry Injection System in Chemical Mechanical Planarization

2011 ◽  
Vol 50 (5) ◽  
pp. 05EC01 ◽  
Author(s):  
Anand Meled ◽  
Yun Zhuang ◽  
Yasa Adi Sampurno ◽  
Siannie Theng ◽  
Yubo Jiao ◽  
...  
Keyword(s):  
Chemical Mechanical Planarization ◽  
Injection System ◽  
Slurry Injection

(Invited) Performance Analysis of a Novel Slurry Injection System for Oxide Chemical Mechanical Planarization

2013 ◽  
Vol 52 (1) ◽  
pp. 591-596 ◽  
Author(s):  
L. Borucki ◽  
Y. Zhuang ◽  
Y. Sampurno ◽  
A. Philipossian ◽  
S. Kreutzer-Schneeweiss
Keyword(s):  
Performance Analysis ◽  
Chemical Mechanical Planarization ◽  
Injection System ◽  
Slurry Injection
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