Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers with Low-Temperature Wafer Direct Bonding

Xiaoqing Wang; Yude Yu; Jin Ning

doi:10.3390/mi7120226

Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers with Low-Temperature Wafer Direct Bonding

Micromachines ◽

10.3390/mi7120226 ◽

2016 ◽

Vol 7 (12) ◽

pp. 226 ◽

Cited By ~ 2

Author(s):

Xiaoqing Wang ◽

Yude Yu ◽

Jin Ning

Keyword(s):

Low Temperature ◽

Ultrasonic Transducers ◽

Capacitive Micromachined Ultrasonic Transducers ◽

Fabrication And Characterization ◽

Wafer Direct Bonding

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Fabrication and Characterization of Capacitive Micromachined Ultrasonic Transducers Integrated on Ultra-thin and Flexible Substrates

2019 IEEE International Ultrasonics Symposium (IUS) ◽

10.1109/ultsym.2019.8926258 ◽

2019 ◽

Author(s):

Ivano Lucarini ◽

Luca Maiolo ◽

Alessandro S. Savoia

Keyword(s):

Ultrasonic Transducers ◽

Flexible Substrates ◽

Capacitive Micromachined Ultrasonic Transducers ◽

Fabrication And Characterization

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Low Temperature Scanning Electron Microscope for Fabrication and Characterization of High-Tc Josephson Junctions and Circuits

10.21236/ada383240 ◽

2000 ◽

Author(s):

Judy Wu ◽

Siyuan Han

Keyword(s):

Electron Microscope ◽

Low Temperature ◽

Scanning Electron Microscope ◽

Josephson Junctions ◽

High Tc ◽

Fabrication And Characterization ◽

Temperature Scanning ◽

Scanning Electron

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Fabrication and characterization of ECTFE hollow fiber membranes via low-temperature thermally induced phase separation (L-TIPS)

Journal of Membrane Science ◽

10.1016/j.memsci.2021.119429 ◽

2021 ◽

pp. 119429

Author(s):

Jian Pan ◽

Wenyi Ma ◽

Lilan Huang ◽

Ruzhe Li ◽

Qinglin Huang ◽

...

Keyword(s):

Phase Separation ◽

Low Temperature ◽

Hollow Fiber ◽

Thermally Induced Phase Separation ◽

Hollow Fiber Membranes ◽

Thermally Induced ◽

Fiber Membranes ◽

Fabrication And Characterization

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Fabrication and characterization of low temperature sintered hard piezoelectric ceramics for multilayer piezoelectric energy harvesters

Ceramics International ◽

10.1016/j.ceramint.2021.02.239 ◽

2021 ◽

Author(s):

Intae Seo ◽

Sora Jo ◽

Dae Su Kim ◽

Hyung-Won Kang ◽

Sahn Nahm ◽

...

Keyword(s):

Low Temperature ◽

Piezoelectric Ceramics ◽

Energy Harvesters ◽

Piezoelectric Energy ◽

Fabrication And Characterization

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Fabrication and Characterization of Low-Temperature Poly-Silicon Lateral p-i-n Diode

IEEE Electron Device Letters ◽

10.1109/led.2010.2043047 ◽

2010 ◽

Vol 31 (5) ◽

pp. 443-445 ◽

Cited By ~ 6

Author(s):

Se Hwan Kim ◽

Seung Hoon Lee ◽

Jin Jang

Keyword(s):

Low Temperature ◽

Poly Silicon ◽

Fabrication And Characterization

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Fabrication and characterization of metal/insulator/semiconductor structures based on TiO2 and TiO2/SiO2 thin films prepared by low-temperature arc vapor deposition

Electronic Materials Letters ◽

10.1007/s13391-013-3244-6 ◽

2014 ◽

Vol 10 (3) ◽

pp. 579-584 ◽

Cited By ~ 4

Author(s):

Kumar Shubham ◽

P. Chakrabarti

Keyword(s):

Thin Films ◽

Low Temperature ◽

Vapor Deposition ◽

Metal Insulator ◽

Metal Insulator Semiconductor ◽

Semiconductor Structures ◽

Fabrication And Characterization

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Fabrication and Characterization of Light Emitting Diode Based on n-ZnO Nanorods Grown Via a Low-Temperature

Journal of Physics Conference Series ◽

10.1088/1742-6596/1535/1/012009 ◽

2020 ◽

Vol 1535 ◽

pp. 012009

Author(s):

Sabah M. Mohammad ◽

Nabeel M. Abd-Alghafour ◽

Z. Hassan ◽

Naser M. Ahmed ◽

Amal Mohamed Ahmed Ali ◽

...

Keyword(s):

Low Temperature ◽

Light Emitting Diode ◽

Zno Nanorods ◽

Light Emitting ◽

Fabrication And Characterization

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Fabrication and characterization of low-temperature SOFC stack based on GDC electrolyte membrane

Journal of Membrane Science ◽

10.1016/j.memsci.2011.01.051 ◽

2011 ◽

Vol 371 (1-2) ◽

pp. 219-225 ◽

Cited By ~ 12

Author(s):

Jiao Ding ◽

Jiang Liu ◽

Guoqiang Yin

Keyword(s):

Low Temperature ◽

Electrolyte Membrane ◽

Low Temperature Sofc ◽

Fabrication And Characterization

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Fabrication and characterization of bipolar transistors with in-situ doped low-temperature (800 degrees C) epitaxial silicon

IEEE Electron Device Letters ◽

10.1109/55.31764 ◽

1989 ◽

Vol 10 (8) ◽

pp. 383-385 ◽

Cited By ~ 2

Author(s):

S. Ohi ◽

R. Burger ◽

R. Reif

Keyword(s):

Low Temperature ◽

Bipolar Transistors ◽

Epitaxial Silicon ◽

Fabrication And Characterization

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Low Temperature Fabrication and Characterization of Porous SiC Ceramics Using Polycarbosilane as Binder

Key Engineering Materials ◽

10.4028/www.scientific.net/kem.336-338.1090 ◽

2007 ◽

Vol 336-338 ◽

pp. 1090-1092 ◽

Cited By ~ 3

Author(s):

Qing Song Ma ◽

Xiao Dong Yu

Keyword(s):

Particle Size ◽

Low Temperature ◽

Fracture Surface ◽

Flexural Strength ◽

Sic Ceramics ◽

Fabrication And Characterization ◽

Porous Sic

Polycarbosilane (PCS) and SiC powders, in which PCS acted as binder, were adopted as starting materials to fabricate porous SiC ceramics. During pyrolysis, PCS experienced an organicinorganic transformation and bonded SiC powders at a low temperature of 1273K. The flexural strength of porous SiC ceramics increased with increasing PCS content and shaping pressure, while the porosity decreased with increasing the PCS content, shaping pressure and particle size of SiC powders. The fracture surface of porous SiC ceramics was observed.

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