scholarly journals Materials, Design, and Characteristics of Bulk Acoustic Wave Resonator: A Review

Micromachines ◽  
2020 ◽  
Vol 11 (7) ◽  
pp. 630 ◽  
Author(s):  
Yan Liu ◽  
Yao Cai ◽  
Yi Zhang ◽  
Alexander Tovstopyat ◽  
Sheng Liu ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
High Frequency ◽  
High Performance ◽  
Low Cost ◽  
Power Level ◽  
Bulk Acoustic Wave ◽  
Market Demand ◽  
Rf Filters ◽  
Spurious Mode ◽  
Lower Insertion Loss

With the rapid commercialization of fifth generation (5G) technology in the world, the market demand for radio frequency (RF) filters continues to grow. Acoustic wave technology has been attracting great attention as one of the effective solutions for achieving high-performance RF filter operations while offering low cost and small device size. Compared with surface acoustic wave (SAW) resonators, bulk acoustic wave (BAW) resonators have more potential in fabricating high- quality RF filters because of their lower insertion loss and better selectivity in the middle and high frequency bands above 2.5 GHz. Here, we provide a comprehensive review about BAW resonator researches, including materials, structure designs, and characteristics. The basic principles and details of recently proposed BAW resonators are carefully investigated. The materials of poly-crystalline aluminum nitride (AlN), single crystal AlN, doped AlN, and electrode are also analyzed and compared. Common approaches to enhance the performance of BAW resonators, suppression of spurious mode, low temperature sensitivity, and tuning ability are introduced with discussions and suggestions for further improvement. Finally, by looking into the challenges of high frequency, wide bandwidth, miniaturization, and high power level, we provide clues to specific materials, structure designs, and RF integration technologies for BAW resonators.

RF-MEMS Based Oscillators

2012 ◽  
pp. 120-155
Author(s):  
Anis Nurashikin Nordin
Keyword(s):  
Acoustic Wave ◽  
Rf Mems ◽  
Low Cost ◽  
Individual Characteristics ◽  
Bulk Acoustic Wave ◽  
Mems Devices ◽  
Device Structure ◽  
Micro Electro Mechanical Systems ◽  
Wireless Transceiver ◽  
Film Bulk

Today’s high-tech consumer market demand complex, portable personal wireless consumer devices that are low-cost and have small sizes. Creative methods of combining mature integrated circuit (IC) fabrication techniques with innovative radio-frequency micro-electro-mechanical systems (RF-MEMS) devices has given birth to wireless transceiver components, which operate at higher frequencies but are manufactured at the low-cost of standard ICs. Oscillators, RF bandpass filters, and low noise amplifiers are the most critical and important modules of any wireless transceiver. Their individual characteristics determine the overall performance of a transceiver. This chapter illustrates RF-oscillators that utilize MEMS devices such as resonators, varactors, and inductors for frequency generation. Emphasis will be given on state of the art RF-MEMS components such as film bulk acoustic wave, surface acoustic wave, flexural mode resonators, lateral and vertical varactors, and solenoid and planar inductors. The advantages and disadvantages of each device structure are described, with reference to the most recent work published in the field.

Fabrication of High Frequency Bulk Acoustic Wave Resonator Using Thinned Single-Crystal Lithium Niobate Layers

2008 ◽  
Vol 362 (1) ◽  
pp. 30-40 ◽  
Author(s):  
D. Gachon ◽  
E. Courjon ◽  
G. Martin ◽  
L. Gauthier-Manuel ◽  
J.-C. Jeannot ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Acoustic Wave ◽  
Single Crystal ◽  
High Frequency ◽  
Bulk Acoustic Wave ◽  
Bulk Acoustic Wave Resonator ◽  
Wave Resonator

Design of Solid Mounted Components Using Bulk Acoustic Wave Technology for Communication

2012 ◽  
Vol 433-440 ◽  
pp. 7579-7582
Author(s):  
B Venkatalakshmi ◽  
K Radhika
Keyword(s):  
Acoustic Wave ◽  
Communication Systems ◽  
High Performance ◽  
Acoustic Resonator ◽  
Bulk Acoustic Wave ◽  
Design System ◽  
Communication Industry ◽  
Rf Design ◽  
Recent Addition ◽  
Run Up

Low power and portable systems working at high frequency are becoming a significant force in the communication industry. SAW filters have been used in wireless communication systems since the early days of mobile phones. But applications at the higher handset frequencies run up against the capability of conventional SAW structures. Bulk Acoustic Wave (BAW) Technology, a relatively recent addition to this portfolio follows MEMS principle to design high performance microwave components for RF communication. Simulation of the Bulk Acoustic Resonator using Butterworth Van Dyke Model (BVD) Model and design of Ladder Filter with the designed resonator in the RF design platform Agilent ADS (Advanced Design System) have been presented. The simulated results confirm the tuning of operating frequency of designed BAW device at 2.4 GHz.

scholarly journals Rare Events Detected with a Bulk Acoustic Wave High Frequency Gravitational Wave Antenna

2021 ◽  
Vol 127 (7) ◽  
Author(s):  
Maxim Goryachev ◽  
William M. Campbell ◽  
Ik Siong Heng ◽  
Serge Galliou ◽  
Eugene N. Ivanov ◽  
...  
Keyword(s):  
Acoustic Wave ◽  
Gravitational Wave ◽  
High Frequency ◽  
Rare Events ◽  
Bulk Acoustic Wave ◽  
Wave Antenna ◽  
Gravitational Wave Antenna
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