scholarly journals Comparison of Argon and Oxygen Plasma Treatments for Ambient Room-Temperature Wafer-Scale Au–Au Bonding Using Ultrathin Au Films

Micromachines ◽  
2019 ◽  
Vol 10 (2) ◽  
pp. 119 ◽  
Author(s):  
Michitaka Yamamoto ◽  
Takashi Matsumae ◽  
Yuichi Kurashima ◽  
Hideki Takagi ◽  
Tadatomo Suga ◽  
...  
Keyword(s):  
Surface Energy ◽  
Plasma Treatment ◽  
Bonding Strength ◽  
Room Temperature ◽  
Activation Mechanism ◽  
Spectroscopy Analysis ◽  
Wafer Scale ◽  
O2 Plasma Treatment ◽  
Ar Plasma ◽  
O2 Plasma

Au–Au surface activated bonding is promising for room-temperature bonding. The use of Ar plasma vs. O2 plasma for pretreatment was investigated for room-temperature wafer-scale Au–Au bonding using ultrathin Au films (<50 nm) in ambient air. The main difference between Ar plasma and O2 plasma is their surface activation mechanism: physical etching and chemical reaction, respectively. Destructive razor blade testing revealed that the bonding strength of samples obtained using Ar plasma treatment was higher than the strength of bulk Si (surface energy of bulk Si: 2.5 J/m2), while that of samples obtained using O2 plasma treatment was low (surface energy: 0.1–0.2 J/m2). X-ray photoelectron spectroscopy analysis revealed that a gold oxide (Au2O3) layer readily formed with O2 plasma treatment, and this layer impeded Au–Au bonding. Thermal desorption spectroscopy analysis revealed that Au2O3 thermally desorbed around 110 °C. Annealing of O2 plasma-treated samples up to 150 °C before bonding increased the bonding strength from 0.1 to 2.5 J/m2 due to Au2O3 decomposition.

scholarly journals Plasma Treatments to Improve the Bonding of Thermo-Treated Cherry Wood

Coatings ◽  
2019 ◽  
Vol 9 (10) ◽  
pp. 656
Author(s):  
Qingzhu Zheng ◽  
Weifeng Zhang ◽  
Huiping Lin ◽  
Junwen Yu ◽  
Wenbin Yang ◽  
...  
Keyword(s):  
Contact Angle ◽  
Plasma Treatment ◽  
Chemical Property ◽  
Bonding Strength ◽  
Surface Chemical ◽  
Water Contact ◽  
Surface Chemical Property ◽  
O2 Plasma Treatment ◽  
O2 Plasma ◽  
N2 Plasma

Thermal treatment can significantly improve the dimensional stability of wood, but it will decrease the bonding strength. In this work, the bonding strength of thermo-treated cherry wood boards was improved by plasma treatment. The change of wettability, surface morphology, and surface chemical property of cherry wood before and after plasma treatment was investigated by water contact angle measurement, Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), and X-ray photoelectron spectroscopy (XPS). The plasma treatment significantly improved the wettability of thermo-treated cherry wood by decreasing its water contact angle from 109.95° to 53.18°. N2 or O2 was used as the plasma atmosphere, and it was found that N2 plasma treatment afforded cherry wood a rougher surface. The AFM roughness of cherry wood was increased from 19 nm to 31.9 nm after N2 plasma treatment. XPS results revealed an additional C–N group for N2 plasma treatment and the content of C=O, O–C–O, and O–C=O increased for O2 plasma treatment, respectively, indicating that the surface chemical property of cherry wood was modified. Due to the surface character, the bonding strength increased by 21.17% for N2 plasma treatment and 15.32% for O2 plasma treatment.

scholarly journals Surface Energy of Filtration Media Influencing the Filtration Performance against Solid Particles, Oily Aerosol, and Bacterial Aerosol

Polymers ◽  
2019 ◽  
Vol 11 (6) ◽  
pp. 935 ◽  
Author(s):  
Seojin Jung ◽  
Jaejin An ◽  
Hyungjin Na ◽  
Jooyoun Kim
Keyword(s):  
Surface Energy ◽  
Plasma Treatment ◽  
Chemical Vapor ◽  
Filtration Efficiency ◽  
Dioctyl Phthalate ◽  
Solid Particles ◽  
Filtration Performance ◽  
Bacterial Aerosol ◽  
O2 Plasma Treatment ◽  
O2 Plasma

Particulate airborne pollutants are a big concern to public health, and it brings growing attention about effective filtration devices. Especially, particulate matters smaller than 2.5 µm can reach the thoracic region and the blood stream, and the associated health risk can be exacerbated when pathogenic microbials are present in the air. This study aims at understanding the surface characteristics of nonwoven media that influence filtration performance against solid particles (sodium chloride, NaCl), oily aerosol (dioctyl phthalate, DOP), and Staphylococcus aureus (S. aureus) bacteria. Nonwoven media of polystyrene (PS) fibers were fabricated by electrospinning and its pristine surface energy (38.5 mN/m) was modified to decrease (12.3 mN/m) by the plasma enhanced chemical vapor deposition (PECVD) of octafluorocyclobutane (C4F8) or to increase (68.5 mN/m) by the oxygen (O2) plasma treatment. For NaCl particles and S. aureus aerosol, PS electrospun web showed higher quality factor than polypropylene (PP) meltblown electret that is readily available for commercial products. The O2 plasma treatment of PS media significantly deteriorated the filtration efficiency, presumably due to the quick dissipation of static charges by the O2 plasma treatment. The C4F8 treated, fluorinated PS media resisted quick wetting of DOP, and its filtration efficiency for DOP and S. aureus remained similar while its efficiency for NaCl decreased. The findings of this study will impact on determining relevant surface treatments for effective particulate filtration. As this study examined the instantaneous performance within 1–2 min of particulate exposure, and the further study with the extended exposure is suggested.

Defect passivation by O2 plasma treatment on high-k dielectric HfO2 films at room temperature

2011 ◽  
Vol 519 (15) ◽  
pp. 5110-5113 ◽  
Author(s):  
Kou-Chen Liu ◽  
Jung-Ruey Tsai ◽  
Wen-Kai Lin ◽  
Chi-Shiau Li ◽  
Jyun-Ning Chen
Keyword(s):  
Plasma Treatment ◽  
Room Temperature ◽  
High K ◽  
Defect Passivation ◽  
O2 Plasma Treatment ◽  
High K Dielectric ◽  
O2 Plasma

Investigation of Plasma Treatment Conditions for Wafer-Scale Room-Temperature Bonding Using Ultrathin Au Films in Ambient Air

2019 ◽  
Vol 139 (7) ◽  
pp. 217-218
Author(s):  
Michitaka Yamamoto ◽  
Takashi Matsumae ◽  
Yuichi Kurashima ◽  
Hideki Takagi ◽  
Tadatomo Suga ◽  
...  
Keyword(s):  
Plasma Treatment ◽  
Room Temperature ◽  
Ambient Air ◽  
Wafer Scale ◽  
Treatment Conditions

Influence of O2 plasma treatment on NiO x layer in perovskite solar cells

2018 ◽  
Vol 57 (4S) ◽  
pp. 04FS07 ◽  
Author(s):  
Yoshihiko Nishihara ◽  
Masayuki Chikamatsu ◽  
Said Kazaoui ◽  
Tetsuhiko Miyadera ◽  
Yuji Yoshida
Keyword(s):  
Solar Cells ◽  
Plasma Treatment ◽  
Perovskite Solar Cells ◽  
O2 Plasma Treatment ◽  
O2 Plasma
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