scholarly journals Impact on the Gas Barrier Property of Silicon Oxide Films Prepared by Tetramethylsilane-Based PECVD Incorporating with Ammonia

2017 ◽  
Vol 7 (1) ◽  
pp. 56 ◽  
Author(s):  
Hua-Wen Liu ◽  
Tai-Hong Chen ◽  
Chun-Hao Chang ◽  
Shao-Kai Lu ◽  
Yi-Cyuan Lin ◽  
...  
Carbon ◽  
2019 ◽  
Vol 150 ◽  
pp. 275-283 ◽  
Author(s):  
Sae Jin Sung ◽  
Jisoo Park ◽  
Young Shik Cho ◽  
Se Hoon Gihm ◽  
Seung Jae Yang ◽  
...  

1985 ◽  
Vol 132 (8) ◽  
pp. 2012-2019 ◽  
Author(s):  
P. Pan ◽  
L. A. Nesbit ◽  
R. W. Douse ◽  
R. T. Gleason
Keyword(s):  

1970 ◽  
Vol 117 (2) ◽  
pp. 272 ◽  
Author(s):  
William A. FitzGibbons ◽  
Thomas Kloffenstein ◽  
Karl M. Busen

2018 ◽  
Vol 24 (S1) ◽  
pp. 1810-1811 ◽  
Author(s):  
Krishna Kanth Neelisetty ◽  
Sebastian Gutsch ◽  
Falk von Seggern ◽  
Alan Molinari ◽  
Alexander Vahl ◽  
...  

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