Impact on the Gas Barrier Property of Silicon Oxide Films Prepared by Tetramethylsilane-Based PECVD Incorporating with Ammonia
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1999 ◽
Vol 71
(12)
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pp. 2091-2100
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Keyword(s):
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1985 ◽
Vol 132
(8)
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pp. 2012-2019
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Keyword(s):
1970 ◽
Vol 117
(2)
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pp. 272
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2018 ◽
Vol 24
(S1)
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pp. 1810-1811
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